@inproceedings{c1342688b6bb4858935247fbf3c309c4,
title = "Low temperature plasma deposition of silicon thin films for flexible electronics",
author = "\{Roca i Cabarrocas\}, P.",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/RTP.2007.4383810",
language = "English",
isbn = "1424412277",
series = "15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007",
booktitle = "15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007",
note = "15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007 ; Conference date: 02-10-2007 Through 05-10-2007",
}