Measurement of the specific heat and determination of the thermodynamic functions of relaxed amorphous silicon

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Abstract

The specific heat, cp, of two amorphous silicon (a-Si) samples has been measured by differential scanning calorimetry in the 100-900 K temperature range. When the hydrogen content is reduced by thermal annealing, cp approaches the value of crystalline Si (c-Si). Within experimental accuracy, we conclude that cp of relaxed pure a-Si coincides with that of c-Si. This result is used to determine the enthalpy, entropy, and Gibbs free energy of defect-free relaxed a-Si. Finally, the contribution of structural defects on these quantities is calculated and the melting point of several states of a-Si is predicted.

Original languageEnglish
Article number173515
JournalJournal of Applied Physics
Volume113
Issue number17
DOIs
Publication statusPublished - 7 May 2013

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