MEMS-Type switches based on carbon nanotube arrays

Didier Pribat; David Dubuc; Katia Grenier; Sebastien Pacchini; Thibault Ricart; Costel Cojocaru

MEMS-Type switches based on carbon nanotube arrays

Didier Pribat
, David Dubuc
, Katia Grenier
, Sebastien Pacchini
, Thibault Ricart
, Costel Cojocaru

Institut polytechnique de Paris

Research output: Contribution to conference › Paper › peer-review

Abstract

Because of their exceptional mechanical characteristics, carbon nanotubes are materials of choice for MEMS applications. We shall present some recent results concerning the fabrication of radio frequency switches based on arrays of carbon nanotubes. Various approaches will be discussed, but emphasis will be put on random arrays, which are easier to fabricate. Our first RF measurements will be presented.

Original language	English
Pages	1477-1478
Number of pages	2
Publication status	Published - 1 Dec 2009
Event	16th International Display Workshops, IDW '09 - Miyazaki, Japan Duration: 9 Dec 2009 → 11 Dec 2009

Conference

Conference	16th International Display Workshops, IDW '09
Country/Territory	Japan
City	Miyazaki
Period	9/12/09 → 11/12/09

Cite this

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title = "MEMS-Type switches based on carbon nanotube arrays",

abstract = "Because of their exceptional mechanical characteristics, carbon nanotubes are materials of choice for MEMS applications. We shall present some recent results concerning the fabrication of radio frequency switches based on arrays of carbon nanotubes. Various approaches will be discussed, but emphasis will be put on random arrays, which are easier to fabricate. Our first RF measurements will be presented.",

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T1 - MEMS-Type switches based on carbon nanotube arrays

AU - Pribat, Didier

AU - Dubuc, David

AU - Grenier, Katia

AU - Pacchini, Sebastien

AU - Ricart, Thibault

AU - Cojocaru, Costel

PY - 2009/12/1

Y1 - 2009/12/1

N2 - Because of their exceptional mechanical characteristics, carbon nanotubes are materials of choice for MEMS applications. We shall present some recent results concerning the fabrication of radio frequency switches based on arrays of carbon nanotubes. Various approaches will be discussed, but emphasis will be put on random arrays, which are easier to fabricate. Our first RF measurements will be presented.

AB - Because of their exceptional mechanical characteristics, carbon nanotubes are materials of choice for MEMS applications. We shall present some recent results concerning the fabrication of radio frequency switches based on arrays of carbon nanotubes. Various approaches will be discussed, but emphasis will be put on random arrays, which are easier to fabricate. Our first RF measurements will be presented.

UR - https://www.scopus.com/pages/publications/77954149725

M3 - Paper

AN - SCOPUS:77954149725

SP - 1477

EP - 1478

T2 - 16th International Display Workshops, IDW '09

Y2 - 9 December 2009 through 11 December 2009

ER -

MEMS-Type switches based on carbon nanotube arrays

Abstract

Conference

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