MEPHISTO spectromicroscope reaches 20 nm lateral resolution

Gelsomina De Stasio; Luca Perfetti; B. Gilbert; O. Fauchoux; M. Capozi; P. Perfetti; G. Margaritondo; B. P. Tonner

doi:10.1063/1.1149661

MEPHISTO spectromicroscope reaches 20 nm lateral resolution

Gelsomina De Stasio
, Luca Perfetti
, B. Gilbert
, O. Fauchoux
, M. Capozi
, P. Perfetti
, G. Margaritondo
, B. P. Tonner

Research output: Contribution to journal › Article › peer-review

Abstract

The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope à Emission de PHotoélectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance.

Original language	English
Pages (from-to)	1740-1742
Number of pages	3
Journal	Review of Scientific Instruments
Volume	70
Issue number	3
DOIs	https://doi.org/10.1063/1.1149661
Publication status	Published - 1 Jan 1999

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10.1063/1.1149661

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title = "MEPHISTO spectromicroscope reaches 20 nm lateral resolution",

abstract = "The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope {\`a} Emission de PHoto{\'e}lectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance.",

author = "\{De Stasio\}, Gelsomina and Luca Perfetti and B. Gilbert and O. Fauchoux and M. Capozi and P. Perfetti and G. Margaritondo and Tonner, \{B. P.\}",

year = "1999",

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AU - De Stasio, Gelsomina

AU - Perfetti, Luca

AU - Gilbert, B.

AU - Fauchoux, O.

AU - Capozi, M.

AU - Perfetti, P.

AU - Margaritondo, G.

AU - Tonner, B. P.

PY - 1999/1/1

Y1 - 1999/1/1

N2 - The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope à Emission de PHotoélectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance.

AB - The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope à Emission de PHotoélectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance.

UR - https://www.scopus.com/pages/publications/0001482406

U2 - 10.1063/1.1149661

DO - 10.1063/1.1149661

M3 - Article

AN - SCOPUS:0001482406

SN - 0034-6748

VL - 70

SP - 1740

EP - 1742

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 3

ER -

MEPHISTO spectromicroscope reaches 20 nm lateral resolution

Abstract

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