Abstract
We report on top gate microcrystalline Si TFT fabrication, device measurements and modelling of integrated drivers for AMLCDs. Microcrystalline silicon TFTs can be made with a simple process and have low mobility, similar to amorphous silicon TFTs, but they also have outstanding stability. Modelling shows that stable TFTs with low mobility can be used for making medium sized AMLCDs with row drivers and column multiplexers. Small increases in mobility would greatly extend their application range.
| Original language | English |
|---|---|
| Pages (from-to) | 367-370 |
| Number of pages | 4 |
| Journal | SID Conference Record of the International Display Research Conference |
| Publication status | Published - 1 Dec 2001 |
| Event | Asia Display/IDW 2001 - Nagoya, Japan Duration: 16 Oct 2002 → 19 Oct 2002 |