Microcrystalline Si TFTs for integrated multiplexers and shift registers

Research output: Contribution to journalConference articlepeer-review

Abstract

We report on top gate microcrystalline Si TFT fabrication, device measurements and modelling of integrated drivers for AMLCDs. Microcrystalline silicon TFTs can be made with a simple process and have low mobility, similar to amorphous silicon TFTs, but they also have outstanding stability. Modelling shows that stable TFTs with low mobility can be used for making medium sized AMLCDs with row drivers and column multiplexers. Small increases in mobility would greatly extend their application range.

Original languageEnglish
Pages (from-to)367-370
Number of pages4
JournalSID Conference Record of the International Display Research Conference
Publication statusPublished - 1 Dec 2001
EventAsia Display/IDW 2001 - Nagoya, Japan
Duration: 16 Oct 200219 Oct 2002

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