Microfabricated textured surfaces for super-hydrophobicity investigations

  • Mathilde Callies
  • , Yong Chen
  • , Frédéric Marty
  • , Anne Pépin
  • , David Quéré

Research output: Contribution to journalConference articlepeer-review

Abstract

The natural hydrophobicity of surfaces can be enhanced if they are micro-textured. This is due to air trapped in the structure, which provides the deposited drop with a composite surface made of solid and air on which it is resting. Here, we give evidence for this effect using a forest of micro-pillars which allows us to control the micro structure density under the drop, and thus the degree of super-hydrophobicity. For this purpose, silicon wafers were firstly patterned by conventional photolithography techniques. After deposition of an aluminium layer, the samples were subjected to a deep reactive ion etching (DRIE) with the "Bosch process" in order to achieve high aspect ratios (≥10). However, this state is not always the most stable situation for a drop on a hydrophobic surface: the drop can also fill up the microstructure. We have been able to observe these two super-hydrophobic states on our surfaces and to characterize advancing and receding contact angles for both of them.

Original languageEnglish
Pages (from-to)100-105
Number of pages6
JournalMicroelectronic Engineering
Volume78-79
Issue number1-4
DOIs
Publication statusPublished - 1 Mar 2005
EventProceedings of the 30th International Conference on Micro- and Nano-Engineering -
Duration: 19 Sept 200422 Sept 2004

Keywords

  • Deep reactive ion etching
  • Microstructures
  • Super-hydrophobicity
  • Wetting properties

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