Microscopic characterization of ablation craters produced by femtosecond laser pulses

V. V. Temnov; K. Sokolowski-Tinten; N. Stojanovic; S. Kudryashov; D. Von der Linde; B. Kogan; A. Schlarb; B. Weyers; R. Möller; J. Seekamp; C. Sotomayor-Torres

doi:10.1117/12.482062

Microscopic characterization of ablation craters produced by femtosecond laser pulses

V. V. Temnov
, K. Sokolowski-Tinten
, N. Stojanovic
, S. Kudryashov
, D. Von der Linde
, B. Kogan
, A. Schlarb
, B. Weyers
, R. Möller
, J. Seekamp
, C. Sotomayor-Torres

University of Duisburg-Essen
Bergische Universität Gesamthochschule Wuppertal

Research output: Contribution to journal › Conference article › peer-review

Abstract

The microscopic characterization of ablation craters on gallium arsenide and silico produced by femtosecond laser pulses were discussed. Optical, atomic force and electron microscopy were used for microscopic analysis of craters. It was found that the boundary of the ablation crater for both gallium and silicon consists of a high and narrow rim. Whereas for GaAs the rim is very high and extremely narrow, for Si it was significantly lower and broader. It was also found that the ablation craters on both GaAs and Si were relatively flat.

Original language	English
Pages (from-to)	1032-1039
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4760
Issue number	II
DOIs	https://doi.org/10.1117/12.482062
Publication status	Published - 1 Jan 2002
Externally published	Yes
Event	High-Power Laser Ablation IV - Taos, United States Duration: 22 Apr 2002 → 26 Apr 2002

Keywords

Laser ablation
Laser surface modification

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10.1117/12.482062

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Temnov, V. V., Sokolowski-Tinten, K., Stojanovic, N., Kudryashov, S., Von der Linde, D., Kogan, B., Schlarb, A., Weyers, B., Möller, R., Seekamp, J., & Sotomayor-Torres, C. (2002). Microscopic characterization of ablation craters produced by femtosecond laser pulses. Proceedings of SPIE - The International Society for Optical Engineering, 4760(II), 1032-1039. https://doi.org/10.1117/12.482062

@article{da778ac3ed4f4202bae00c79e23d2786,

title = "Microscopic characterization of ablation craters produced by femtosecond laser pulses",

abstract = "The microscopic characterization of ablation craters on gallium arsenide and silico produced by femtosecond laser pulses were discussed. Optical, atomic force and electron microscopy were used for microscopic analysis of craters. It was found that the boundary of the ablation crater for both gallium and silicon consists of a high and narrow rim. Whereas for GaAs the rim is very high and extremely narrow, for Si it was significantly lower and broader. It was also found that the ablation craters on both GaAs and Si were relatively flat.",

keywords = "Laser ablation, Laser surface modification",

author = "Temnov, \{V. V.\} and K. Sokolowski-Tinten and N. Stojanovic and S. Kudryashov and \{Von der Linde\}, D. and B. Kogan and A. Schlarb and B. Weyers and R. M{\"o}ller and J. Seekamp and C. Sotomayor-Torres",

year = "2002",

month = jan,

day = "1",

doi = "10.1117/12.482062",

language = "English",

volume = "4760",

pages = "1032--1039",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

number = "II",

note = "High-Power Laser Ablation IV ; Conference date: 22-04-2002 Through 26-04-2002",

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Temnov, VV, Sokolowski-Tinten, K, Stojanovic, N, Kudryashov, S, Von der Linde, D, Kogan, B, Schlarb, A, Weyers, B, Möller, R, Seekamp, J & Sotomayor-Torres, C 2002, 'Microscopic characterization of ablation craters produced by femtosecond laser pulses', Proceedings of SPIE - The International Society for Optical Engineering, vol. 4760, no. II, pp. 1032-1039. https://doi.org/10.1117/12.482062

TY - JOUR

T1 - Microscopic characterization of ablation craters produced by femtosecond laser pulses

AU - Temnov, V. V.

AU - Sokolowski-Tinten, K.

AU - Stojanovic, N.

AU - Kudryashov, S.

AU - Von der Linde, D.

AU - Kogan, B.

AU - Schlarb, A.

AU - Weyers, B.

AU - Möller, R.

AU - Seekamp, J.

AU - Sotomayor-Torres, C.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - The microscopic characterization of ablation craters on gallium arsenide and silico produced by femtosecond laser pulses were discussed. Optical, atomic force and electron microscopy were used for microscopic analysis of craters. It was found that the boundary of the ablation crater for both gallium and silicon consists of a high and narrow rim. Whereas for GaAs the rim is very high and extremely narrow, for Si it was significantly lower and broader. It was also found that the ablation craters on both GaAs and Si were relatively flat.

AB - The microscopic characterization of ablation craters on gallium arsenide and silico produced by femtosecond laser pulses were discussed. Optical, atomic force and electron microscopy were used for microscopic analysis of craters. It was found that the boundary of the ablation crater for both gallium and silicon consists of a high and narrow rim. Whereas for GaAs the rim is very high and extremely narrow, for Si it was significantly lower and broader. It was also found that the ablation craters on both GaAs and Si were relatively flat.

KW - Laser ablation

KW - Laser surface modification

UR - https://www.scopus.com/pages/publications/18744415690

U2 - 10.1117/12.482062

DO - 10.1117/12.482062

M3 - Conference article

AN - SCOPUS:18744415690

SN - 0277-786X

VL - 4760

SP - 1032

EP - 1039

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

IS - II

T2 - High-Power Laser Ablation IV

Y2 - 22 April 2002 through 26 April 2002

ER -

Microscopic characterization of ablation craters produced by femtosecond laser pulses

Abstract

Keywords

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