@inproceedings{3a297564598044b28c60f570dbc5c67c,
title = "Mueller polarimetry in the back focal plane",
abstract = "A new Mueller polarimeter based on liquid crystals and a microscope objective is presented, for the characterization of diffraction gratings in a conical diffraction mounting. Fast measurements of complete Mueller matrices over a range of polar angles (0-56°) and azimuthal angles (0-360°) are achieved without mechanical movements. The polarization state generator and analyzer make use of nematic variable retarders. The angular range is achieved through focalization of light over the measured sample with a microscope objective with a high numerical aperture and imaging of the objective back Fourier plane on a CCD. Results on isotropic samples and diffraction gratings are shown.",
keywords = "Calibration, Conical diffraction, Ellipsometry, Mueller matrix, Polarimetry",
author = "\{De Martino\}, A. and \{Ben Hatit\}, S. and M. Foldyna",
year = "2007",
month = oct,
day = "15",
doi = "10.1117/12.708627",
language = "English",
isbn = "0819466379",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
number = "PART 1",
booktitle = "Metrology, Inspection, and Process Control for Microlithography XXI",
edition = "PART 1",
note = "Metrology, Inspection, and Process Control for Microlithography XXI ; Conference date: 26-02-2007 Through 01-03-2007",
}