Abstract
Nanoporous alumina templates are demonstrated as device structures for nanowire field-effect transistors (FETs). A ZnO nanowire surrounding gate FET demonstrates the utility of this nanostructured template. This bottom-up approach is unique in that the fabrication can be almost entirely done using room temperature electrochemistry. The technique is extended to lateral-anodized nanoporous aluminum thin-films, compatible with standard silicon technology and illustrated by the possible fabrication of an active matrix backplane with only four lithographic masks.
| Original language | English |
|---|---|
| Title of host publication | Nanostructures in Electronics and Photonics |
| Publisher | Pan Stanford Publishing Pte. Ltd. |
| Pages | 41-61 |
| Number of pages | 21 |
| ISBN (Electronic) | 9789814241120 |
| ISBN (Print) | 9789814241106 |
| Publication status | Published - 19 Apr 2016 |