New Techniques For The Measurement of X-Ray Beam or X-Ray Optics Quality

  • Ph Zeitoun
  • , Ph Balcou
  • , S. Bucourt
  • , D. Benredjem
  • , F. Delmotte
  • , G. Dovillaire
  • , D. Douillet
  • , J. Dunn
  • , G. Faivre
  • , M. Fajardo
  • , K. A. Goldberg
  • , M. Idir
  • , S. Hubert
  • , J. R. Hunter
  • , S. Jacquemot
  • , S. Kazamias
  • , S. Le Pape
  • , X. Levecq
  • , C. L.S. Lewis
  • , R. Marmoret
  • P. Mercère, A. S. Morlens, P. P. Naulleau, C. Rémond, J. J. Rocca, S. Sebban, R. F. Smith, M. F. Ravet, P. Troussel, C. Valentin, L. Vanbostal

Research output: Contribution to journalConference articlepeer-review

Abstract

Metrology of XUV beams and more specifically X-ray laser (XRL) beam is of crucial importance for development of applications. We have then developed several new optical systems enabling to measure the x-ray laser optical properties. By use of a Michelson interferometer working as a Fourier-Transform spectrometer, the line shapes of different x-ray lasers have been measured with an unprecedented accuracy (δλ/λ∼10-6). Achievement of the first XUV wavefront sensor has enable to measure the beam quality of laser-pumped as well as discharge pumped x-ray lasers. Capillary discharge XRL has demonstrated a very good wavefront allowing to achieve intensity as high 3*1014 Wcm-2 by focusing with a f = 5 cm mirror. The measured sensor accuracy is as good as λ/120 at 13 nm. Commercial developments are under way.

Original languageEnglish
Pages (from-to)194-204
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5197
DOIs
Publication statusPublished - 1 Jan 2003
Externally publishedYes
EventSoft X-Ray Lasers and Applications V - San Diego, CA, United States
Duration: 6 Aug 20037 Aug 2003

Keywords

  • EUV optics
  • Longitudinal coherence
  • Michelson soft x-ray interferometry
  • X-ray laser

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