Abstract
Metrology of XUV beams and more specifically X-ray laser (XRL) beam is of crucial importance for development of applications. We have then developed several new optical systems enabling to measure the x-ray laser optical properties. By use of a Michelson interferometer working as a Fourier-Transform spectrometer, the line shapes of different x-ray lasers have been measured with an unprecedented accuracy (δλ/λ∼10-6). Achievement of the first XUV wavefront sensor has enable to measure the beam quality of laser-pumped as well as discharge pumped x-ray lasers. Capillary discharge XRL has demonstrated a very good wavefront allowing to achieve intensity as high 3*1014 Wcm-2 by focusing with a f = 5 cm mirror. The measured sensor accuracy is as good as λ/120 at 13 nm. Commercial developments are under way.
| Original language | English |
|---|---|
| Pages (from-to) | 194-204 |
| Number of pages | 11 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5197 |
| DOIs | |
| Publication status | Published - 1 Jan 2003 |
| Externally published | Yes |
| Event | Soft X-Ray Lasers and Applications V - San Diego, CA, United States Duration: 6 Aug 2003 → 7 Aug 2003 |
Keywords
- EUV optics
- Longitudinal coherence
- Michelson soft x-ray interferometry
- X-ray laser
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