@inproceedings{c7d43bb0597f46a4932b90497be63ab1,
title = "Noise Evasion Properties of Electrostatic Gap-Closing MEMS Resonators with Pulsed Excitation Waveforms",
abstract = "The limits on MEMS resonant sensor performance set by nonlinearity are often studied through a model of a Duffing resonator, with linear actuation. This model largely fails to capture the properties of MEMS resonant sensors with electrostatic gap-closing actuation. We have shown that a specific feature of such ubiquitous resonators is that their stability is strongly sensitive to the waveform used to drive them to resonance. In this paper, we conduct an analytical investigation of these phenomena and validate our theoretical results transient simulations.",
keywords = "electrostatic actuation, frequency stability, nonlinearity, resonant sensors",
author = "Jerome Juillard and Antonio Somma and Alexis Brenes",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020 ; Conference date: 19-07-2020 Through 23-07-2020",
year = "2020",
month = jul,
day = "1",
doi = "10.1109/IFCS-ISAF41089.2020.9234844",
language = "English",
series = "IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings",
}