Abstract
We have studied the electrical conductivity behavior of highly crystallized undoped hydrogenated microcrystalline silicon (μc-Si:H) films having different microstructures. The dark conductivity is seen to follow Meyer-Neldel rule (MNR) in some films and anti-MNR in others, which has been explained on the basis of variation in the film microstructure and the corresponding changes in the effective density of states distributions. A band tail transport and statistical shift of Fermi level are used to explain the origin of MNR as well as anti-MNR in our samples. The observation of MNR and anti-MNR in electrical transport behavior of μc-Si:H is discussed in terms of the basic underlying physics of their origin and the significance of these relationships.
| Original language | English |
|---|---|
| Pages (from-to) | 2263-2267 |
| Number of pages | 5 |
| Journal | Journal of Non-Crystalline Solids |
| Volume | 354 |
| Issue number | 19-25 |
| DOIs | |
| Publication status | Published - 1 May 2008 |
Keywords
- Amorphous semiconductors
- Chemical vapor deposition
- Conductivity
- Electrical and electronic properties
- Ellipsometry
- Films and coatings
- Microcrystallinity
- Microstructure
- Photoconductivity
- Plasma deposition
- Solar cells
- Surfaces and interfaces
- Thin film transistors