Normal and anti Meyer-Neldel rule in conductivity of highly crystallized undoped microcrystalline silicon films

Sanjay K. Ram, Satyendra Kumar, P. Roca i Cabarrocas

Research output: Contribution to journalArticlepeer-review

Abstract

We have studied the electrical conductivity behavior of highly crystallized undoped hydrogenated microcrystalline silicon (μc-Si:H) films having different microstructures. The dark conductivity is seen to follow Meyer-Neldel rule (MNR) in some films and anti-MNR in others, which has been explained on the basis of variation in the film microstructure and the corresponding changes in the effective density of states distributions. A band tail transport and statistical shift of Fermi level are used to explain the origin of MNR as well as anti-MNR in our samples. The observation of MNR and anti-MNR in electrical transport behavior of μc-Si:H is discussed in terms of the basic underlying physics of their origin and the significance of these relationships.

Original languageEnglish
Pages (from-to)2263-2267
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume354
Issue number19-25
DOIs
Publication statusPublished - 1 May 2008

Keywords

  • Amorphous semiconductors
  • Chemical vapor deposition
  • Conductivity
  • Electrical and electronic properties
  • Ellipsometry
  • Films and coatings
  • Microcrystallinity
  • Microstructure
  • Photoconductivity
  • Plasma deposition
  • Solar cells
  • Surfaces and interfaces
  • Thin film transistors

Fingerprint

Dive into the research topics of 'Normal and anti Meyer-Neldel rule in conductivity of highly crystallized undoped microcrystalline silicon films'. Together they form a unique fingerprint.

Cite this