Novel holographic setup to realize on-chip photolithographic mask for bragg grating inscription

Richard Ferriere, Badr Eddine Benkelfat

Research output: Contribution to journalArticlepeer-review

Abstract

Many applications of integrated optics, related especially to multi-wavelength telecommunications, require the use of dichroïc reflectors enabling the achievement of narrow or broad-band wavelength selective filters. Bragg mirrors in particular are very good candidate for that purpose. In this paper, we describe the design of a holographic setup used to record a photolithographic mask directly on the substrate, enabling the inscription of a periodic and aperiodic parameters waveguides. This holographic setup, based on a triangular interferometer allows a very precise adjustment of the fringe spacing of a interference pattern and at the same time maintains great stability against the external perturbations.

Original languageEnglish
Pages (from-to)275-280
Number of pages6
JournalOptics Communications
Volume206
Issue number4-6
DOIs
Publication statusPublished - 1 Jun 2002
Externally publishedYes

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