Abstract
In this paper we propose an efficient technique for micromachining lithium niobate that is used in Ti-diffused wave guides. The use of Focused Ion Beam (FIB) etching allows obtaining homogeneous periodic microstructures. Bragg gratings with a period of 1.05 μm and an aspect ratio of 6:1 (depth-to-half period ratio) have been achieved. A reflectivity greater than 95% associated with a bandwidth at half maximum of about 100 nm within a window centered at 1550 nm, is demonstrated for a Bragg grating of period Λ = 1.8 μm and a length of 144 μm, in good agreement with theoretical predictions.
| Original language | English |
|---|---|
| Article number | 5587871 |
| Pages (from-to) | 3488-3493 |
| Number of pages | 6 |
| Journal | Journal of Lightwave Technology |
| Volume | 28 |
| Issue number | 23 |
| DOIs | |
| Publication status | Published - 10 Dec 2010 |
Keywords
- Bragg grating
- focused ion beam
- integrated optics
- lithium niobate
- waveguide