Oxidation of the 8 × 8-reconstructed β-Si                         3                         N                         4                         (0 0 0 1) surface: A photoemission study

R. Flammini; A. Bellucci; F. Wiame; R. Belkhou; M. Carbone; D. M. Trucchi; S. Colonna; F. Ronci; M. Hajlaoui; M. G. Silly; F. Sirotti

doi:10.1016/j.apsusc.2015.07.019

Oxidation of the 8 × 8-reconstructed β-Si ₃ N ₄ (0 0 0 1) surface: A photoemission study

R. Flammini
, A. Bellucci
, F. Wiame
, R. Belkhou
, M. Carbone
, D. M. Trucchi
, S. Colonna
, F. Ronci
, M. Hajlaoui
, M. G. Silly
, F. Sirotti

Consiglio Nazionale delle Ricerche
Laboratoire Charles Friedel (LCF)
Synchrotron SOLEIL
University of Rome “Tor Vergata”

Research output: Contribution to journal › Article › peer-review

Abstract

The thermal oxidation of the β-Si ₃ N ₄ (0 0 0 1)-8 × 8 surface has been carried out. The spectroscopic characterization has been performed by high resolution core-level and by angle-resolved photoemission spectroscopy. Our findings demonstrate that the surface shows a low but clear reactivity with oxygen. The known resonance ascribed to the 8 × 8 reconstruction results strongly affected by the oxygen dosing, demonstrating the involvement of the topmost nitride atoms.

Original language	English
Pages (from-to)	93-97
Number of pages	5
Journal	Applied Surface Science
Volume	355
DOIs	https://doi.org/10.1016/j.apsusc.2015.07.019
Publication status	Published - 15 Nov 2015
Externally published	Yes

Keywords

ARPES
Nitridation
Oxidation
Resonance
Silicon nitride

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10.1016/j.apsusc.2015.07.019

Cite this

Flammini, R., Bellucci, A., Wiame, F., Belkhou, R., Carbone, M., Trucchi, D. M., Colonna, S., Ronci, F., Hajlaoui, M., Silly, M. G., & Sirotti, F. (2015). Oxidation of the 8 × 8-reconstructed β-Si ₃ N ₄ (0 0 0 1) surface: A photoemission study. Applied Surface Science, 355, 93-97. https://doi.org/10.1016/j.apsusc.2015.07.019

@article{26ffda671a754cb9baaf196572e2539d,

title = "Oxidation of the 8 × 8-reconstructed β-Si 3 N 4 (0 0 0 1) surface: A photoemission study",

abstract = " The thermal oxidation of the β-Si 3 N 4 (0 0 0 1)-8 × 8 surface has been carried out. The spectroscopic characterization has been performed by high resolution core-level and by angle-resolved photoemission spectroscopy. Our findings demonstrate that the surface shows a low but clear reactivity with oxygen. The known resonance ascribed to the 8 × 8 reconstruction results strongly affected by the oxygen dosing, demonstrating the involvement of the topmost nitride atoms.",

keywords = "ARPES, Nitridation, Oxidation, Resonance, Silicon nitride",

author = "R. Flammini and A. Bellucci and F. Wiame and R. Belkhou and M. Carbone and Trucchi, \{D. M.\} and S. Colonna and F. Ronci and M. Hajlaoui and Silly, \{M. G.\} and F. Sirotti",

year = "2015",

month = nov,

day = "15",

doi = "10.1016/j.apsusc.2015.07.019",

language = "English",

volume = "355",

pages = "93--97",

journal = "Applied Surface Science",

issn = "0169-4332",

}

Flammini, R, Bellucci, A, Wiame, F, Belkhou, R, Carbone, M, Trucchi, DM, Colonna, S, Ronci, F, Hajlaoui, M, Silly, MG & Sirotti, F 2015, 'Oxidation of the 8 × 8-reconstructed β-Si ₃ N ₄ (0 0 0 1) surface: A photoemission study', Applied Surface Science, vol. 355, pp. 93-97. https://doi.org/10.1016/j.apsusc.2015.07.019

TY - JOUR

T1 - Oxidation of the 8 × 8-reconstructed β-Si 3 N 4 (0 0 0 1) surface

T2 - A photoemission study

AU - Flammini, R.

AU - Bellucci, A.

AU - Wiame, F.

AU - Belkhou, R.

AU - Carbone, M.

AU - Trucchi, D. M.

AU - Colonna, S.

AU - Ronci, F.

AU - Hajlaoui, M.

AU - Silly, M. G.

AU - Sirotti, F.

PY - 2015/11/15

Y1 - 2015/11/15

N2 - The thermal oxidation of the β-Si 3 N 4 (0 0 0 1)-8 × 8 surface has been carried out. The spectroscopic characterization has been performed by high resolution core-level and by angle-resolved photoemission spectroscopy. Our findings demonstrate that the surface shows a low but clear reactivity with oxygen. The known resonance ascribed to the 8 × 8 reconstruction results strongly affected by the oxygen dosing, demonstrating the involvement of the topmost nitride atoms.

AB - The thermal oxidation of the β-Si 3 N 4 (0 0 0 1)-8 × 8 surface has been carried out. The spectroscopic characterization has been performed by high resolution core-level and by angle-resolved photoemission spectroscopy. Our findings demonstrate that the surface shows a low but clear reactivity with oxygen. The known resonance ascribed to the 8 × 8 reconstruction results strongly affected by the oxygen dosing, demonstrating the involvement of the topmost nitride atoms.

KW - ARPES

KW - Nitridation

KW - Oxidation

KW - Resonance

KW - Silicon nitride

U2 - 10.1016/j.apsusc.2015.07.019

DO - 10.1016/j.apsusc.2015.07.019

M3 - Article

AN - SCOPUS:84944338962

SN - 0169-4332

VL - 355

SP - 93

EP - 97

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Oxidation of the 8 × 8-reconstructed β-Si 3 N 4 (0 0 0 1) surface: A photoemission study

Abstract

Keywords

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Oxidation of the 8 × 8-reconstructed β-Si ₃ N ₄ (0 0 0 1) surface: A photoemission study