Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm

J. P. Booth; O. Joubert; J. Pelletier; N. Sadeghi

doi:10.1063/1.347395

Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm

J. P. Booth
, O. Joubert
, J. Pelletier
, N. Sadeghi

Research output: Contribution to journal › Review article › peer-review

Abstract

Resonance absorption at 130 nm was used to measure absolute oxygen atom concentrations in O₂-containing distributed electron cyclotron resonance plasmas. The dissociation fraction [O]/[O₂] in pure O ₂ plasmas (1-6 mTorr) was in the range 0.01-0.06, but was significantly increased by the addition of SF₆, N₂ or Kr. At 2 mTorr total pressure a maximum [O]/[O₂] of 0.3 was observed for 10% SF₆ added. The results were compared to those obtained by optical emission actinometry measurements. The quantity I₀ (844 nm)/I _Ar (750 nm) (with 0.1 mTorr Ar added) was poorly correlated with [O] but well correlated with [O₂]. This suggests that, for dissociation fractions lower than 0.1, dissociative excitation, O₂+e→O* (3p ³P)+O, is the most important mechanism for the production of 844 nm emission.

Original language	English
Pages (from-to)	618-626
Number of pages	9
Journal	Journal of Applied Physics
Volume	69
Issue number	2
DOIs	https://doi.org/10.1063/1.347395
Publication status	Published - 1 Jan 1991
Externally published	Yes

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@article{04c695b4451c45879f862a9bba07de42,

title = "Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm",

abstract = "Resonance absorption at 130 nm was used to measure absolute oxygen atom concentrations in O2-containing distributed electron cyclotron resonance plasmas. The dissociation fraction [O]/[O2] in pure O 2 plasmas (1-6 mTorr) was in the range 0.01-0.06, but was significantly increased by the addition of SF6, N2 or Kr. At 2 mTorr total pressure a maximum [O]/[O2] of 0.3 was observed for 10\% SF6 added. The results were compared to those obtained by optical emission actinometry measurements. The quantity I0 (844 nm)/I Ar (750 nm) (with 0.1 mTorr Ar added) was poorly correlated with [O] but well correlated with [O2]. This suggests that, for dissociation fractions lower than 0.1, dissociative excitation, O2+e→O* (3p 3P)+O, is the most important mechanism for the production of 844 nm emission.",

author = "Booth, \{J. P.\} and O. Joubert and J. Pelletier and N. Sadeghi",

year = "1991",

month = jan,

day = "1",

doi = "10.1063/1.347395",

language = "English",

volume = "69",

pages = "618--626",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "2",

}

TY - JOUR

T1 - Oxygen atom actinometry reinvestigated

T2 - Comparison with absolute measurements by resonance absorption at 130 nm

AU - Booth, J. P.

AU - Joubert, O.

AU - Pelletier, J.

AU - Sadeghi, N.

PY - 1991/1/1

Y1 - 1991/1/1

N2 - Resonance absorption at 130 nm was used to measure absolute oxygen atom concentrations in O2-containing distributed electron cyclotron resonance plasmas. The dissociation fraction [O]/[O2] in pure O 2 plasmas (1-6 mTorr) was in the range 0.01-0.06, but was significantly increased by the addition of SF6, N2 or Kr. At 2 mTorr total pressure a maximum [O]/[O2] of 0.3 was observed for 10% SF6 added. The results were compared to those obtained by optical emission actinometry measurements. The quantity I0 (844 nm)/I Ar (750 nm) (with 0.1 mTorr Ar added) was poorly correlated with [O] but well correlated with [O2]. This suggests that, for dissociation fractions lower than 0.1, dissociative excitation, O2+e→O* (3p 3P)+O, is the most important mechanism for the production of 844 nm emission.

AB - Resonance absorption at 130 nm was used to measure absolute oxygen atom concentrations in O2-containing distributed electron cyclotron resonance plasmas. The dissociation fraction [O]/[O2] in pure O 2 plasmas (1-6 mTorr) was in the range 0.01-0.06, but was significantly increased by the addition of SF6, N2 or Kr. At 2 mTorr total pressure a maximum [O]/[O2] of 0.3 was observed for 10% SF6 added. The results were compared to those obtained by optical emission actinometry measurements. The quantity I0 (844 nm)/I Ar (750 nm) (with 0.1 mTorr Ar added) was poorly correlated with [O] but well correlated with [O2]. This suggests that, for dissociation fractions lower than 0.1, dissociative excitation, O2+e→O* (3p 3P)+O, is the most important mechanism for the production of 844 nm emission.

U2 - 10.1063/1.347395

DO - 10.1063/1.347395

M3 - Review article

AN - SCOPUS:0000534308

SN - 0021-8979

VL - 69

SP - 618

EP - 626

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm

Abstract

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