Precise phase-modulation generalized ellipsometry of anisotropic samples

L. H. Halagačka; K. P. Postava; M. F. Foldyna; J. P. Pištora

doi:10.1002/pssa.200777823

Precise phase-modulation generalized ellipsometry of anisotropic samples

L. H. Halagačka
, K. P. Postava
, M. F. Foldyna
, J. P. Pištora

Technical University Ostrava
University of Białystok

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL. Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PFM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.

Original language	English
Pages (from-to)	752-755
Number of pages	4
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	205
Issue number	4
DOIs	https://doi.org/10.1002/pssa.200777823
Publication status	Published - 1 Apr 2008

Access to Document

10.1002/pssa.200777823

Cite this

@article{761e5ce282924af8a23adf5d36b8f5c1,

title = "Precise phase-modulation generalized ellipsometry of anisotropic samples",

abstract = "A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL. Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PFM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.",

author = "Halaga{\v c}ka, \{L. H.\} and Postava, \{K. P.\} and Foldyna, \{M. F.\} and Pi{\v s}tora, \{J. P.\}",

year = "2008",

month = apr,

day = "1",

doi = "10.1002/pssa.200777823",

language = "English",

volume = "205",

pages = "752--755",

journal = "Physica Status Solidi (A) Applications and Materials Science",

issn = "1862-6300",

publisher = "Wiley-VCH Verlag",

number = "4",

}

TY - JOUR

T1 - Precise phase-modulation generalized ellipsometry of anisotropic samples

AU - Halagačka, L. H.

AU - Postava, K. P.

AU - Foldyna, M. F.

AU - Pištora, J. P.

PY - 2008/4/1

Y1 - 2008/4/1

N2 - A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL. Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PFM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.

AB - A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL. Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PFM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.

U2 - 10.1002/pssa.200777823

DO - 10.1002/pssa.200777823

M3 - Article

AN - SCOPUS:54849413073

SN - 1862-6300

VL - 205

SP - 752

EP - 755

JO - Physica Status Solidi (A) Applications and Materials Science

JF - Physica Status Solidi (A) Applications and Materials Science

IS - 4

ER -

Precise phase-modulation generalized ellipsometry of anisotropic samples

Abstract

Access to Document

Fingerprint

Cite this