Probing dusty-plasma/surface interactions with a heat flux microsensor

S. N. Abolmasov; P. A. Cormier; A. Torres Rios; R. Dussart; N. Semmar; A. L. Thomann; P. Roca I Cabarrocas

doi:10.1063/1.3674290

Probing dusty-plasma/surface interactions with a heat flux microsensor

S. N. Abolmasov
, P. A. Cormier
, A. Torres Rios
, R. Dussart
, N. Semmar
, A. L. Thomann
, P. Roca I Cabarrocas

GREMI Groupe de Recherches sur l'Energetique des Milieux Ionises

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm ². Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.

Original language	English
Article number	011601
Journal	Applied Physics Letters
Volume	100
Issue number	1
DOIs	https://doi.org/10.1063/1.3674290
Publication status	Published - 2 Jan 2012

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10.1063/1.3674290

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title = "Probing dusty-plasma/surface interactions with a heat flux microsensor",

abstract = "Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm 2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.",

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AU - Abolmasov, S. N.

AU - Cormier, P. A.

AU - Torres Rios, A.

AU - Dussart, R.

AU - Semmar, N.

AU - Thomann, A. L.

AU - Roca I Cabarrocas, P.

PY - 2012/1/2

Y1 - 2012/1/2

N2 - Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm 2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.

AB - Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm 2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.

U2 - 10.1063/1.3674290

DO - 10.1063/1.3674290

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SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

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ER -

Probing dusty-plasma/surface interactions with a heat flux microsensor

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