Radical dynamics in unstable CF4 inductive discharges

P. Chabert; H. Abada; J. P. Booth; M. A. Lieberman

doi:10.1063/1.1578175

Radical dynamics in unstable CF₄ inductive discharges

P. Chabert
, H. Abada
, J. P. Booth
, M. A. Lieberman

University of California

Research output: Contribution to journal › Article › peer-review

Abstract

Instabilities in plasma in pure CF₄ gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF₄ were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.

Original language	English
Pages (from-to)	76-84
Number of pages	9
Journal	Journal of Applied Physics
Volume	94
Issue number	1
DOIs	https://doi.org/10.1063/1.1578175
Publication status	Published - 1 Jul 2003

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10.1063/1.1578175

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title = "Radical dynamics in unstable CF4 inductive discharges",

abstract = "Instabilities in plasma in pure CF4 gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF4 were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.",

author = "P. Chabert and H. Abada and Booth, \{J. P.\} and Lieberman, \{M. A.\}",

year = "2003",

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AU - Booth, J. P.

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N2 - Instabilities in plasma in pure CF4 gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF4 were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.

AB - Instabilities in plasma in pure CF4 gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF4 were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.

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DO - 10.1063/1.1578175

M3 - Article

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SN - 0021-8979

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SP - 76

EP - 84

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

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Radical dynamics in unstable CF4 inductive discharges

Abstract

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Radical dynamics in unstable CF₄ inductive discharges