Reconstruction of grating parameters from ellipsometric data

M. Foldyna; D. Ciprian; J. Pištora; K. Postava; R. Antoš

doi:10.1117/12.560118

Reconstruction of grating parameters from ellipsometric data

M. Foldyna
, D. Ciprian
, J. Pištora
, K. Postava
, R. Antoš

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of squared shape, with sharp edges and depth to period ratio about 1/1000. The rigorous coupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit si to find unknown thickness of ail parts of dots.

Original language	English
Pages (from-to)	226-229
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5445
DOIs	https://doi.org/10.1117/12.560118
Publication status	Published - 6 Jul 2004
Externally published	Yes
Event	Microwave and Optical Technology 2003 - Ostrava, Czech Republic Duration: 11 Aug 2003 → 15 Aug 2003

Keywords

2D structure
Ellipsometric data
Isotropic grating
Thickness fit

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10.1117/12.560118

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title = "Reconstruction of grating parameters from ellipsometric data",

abstract = "This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of squared shape, with sharp edges and depth to period ratio about 1/1000. The rigorous coupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit si to find unknown thickness of ail parts of dots.",

keywords = "2D structure, Ellipsometric data, Isotropic grating, Thickness fit",

author = "M. Foldyna and D. Ciprian and J. Pi{\v s}tora and K. Postava and R. Anto{\v s}",

year = "2004",

month = jul,

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doi = "10.1117/12.560118",

language = "English",

volume = "5445",

pages = "226--229",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Microwave and Optical Technology 2003 ; Conference date: 11-08-2003 Through 15-08-2003",

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TY - JOUR

T1 - Reconstruction of grating parameters from ellipsometric data

AU - Foldyna, M.

AU - Ciprian, D.

AU - Pištora, J.

AU - Postava, K.

AU - Antoš, R.

PY - 2004/7/6

Y1 - 2004/7/6

N2 - This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of squared shape, with sharp edges and depth to period ratio about 1/1000. The rigorous coupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit si to find unknown thickness of ail parts of dots.

AB - This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of squared shape, with sharp edges and depth to period ratio about 1/1000. The rigorous coupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit si to find unknown thickness of ail parts of dots.

KW - 2D structure

KW - Ellipsometric data

KW - Isotropic grating

KW - Thickness fit

U2 - 10.1117/12.560118

DO - 10.1117/12.560118

M3 - Conference article

AN - SCOPUS:3042682286

SN - 0277-786X

VL - 5445

SP - 226

EP - 229

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Microwave and Optical Technology 2003

Y2 - 11 August 2003 through 15 August 2003

ER -

Reconstruction of grating parameters from ellipsometric data

Abstract

Keywords

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