Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge

P. Chabert; J. L. Raimbault; J. M. Rax; M. A. Lieberman

doi:10.1063/1.1688334

Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge

P. Chabert, J. L. Raimbault, J. M. Rax, M. A. Lieberman

University of California

Research output: Contribution to journal › Article › peer-review

Abstract

Two different global discharge models was coupled to a transmission line model to obtain the self consistent characteristics of the standing wave effect. A hamiltonian description was used to obtain an analytical expression for the wavelength and to determine the dependence of wavelength upon the main control parameters. The value of wavelength divided by wavelength in vacuum gives a direct measure of the amplitude of nonuniformities induced by the standing wave effect. The models limitation and possible area of improvement were also discussed.

Original language	English
Pages (from-to)	1775-1785
Number of pages	11
Journal	Physics of Plasmas
Volume	11
Issue number	5 PART 1
DOIs	https://doi.org/10.1063/1.1688334
Publication status	Published - 1 May 2004

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10.1063/1.1688334

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title = "Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge",

abstract = "Two different global discharge models was coupled to a transmission line model to obtain the self consistent characteristics of the standing wave effect. A hamiltonian description was used to obtain an analytical expression for the wavelength and to determine the dependence of wavelength upon the main control parameters. The value of wavelength divided by wavelength in vacuum gives a direct measure of the amplitude of nonuniformities induced by the standing wave effect. The models limitation and possible area of improvement were also discussed.",

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AU - Chabert, P.

AU - Raimbault, J. L.

AU - Rax, J. M.

AU - Lieberman, M. A.

PY - 2004/5/1

Y1 - 2004/5/1

N2 - Two different global discharge models was coupled to a transmission line model to obtain the self consistent characteristics of the standing wave effect. A hamiltonian description was used to obtain an analytical expression for the wavelength and to determine the dependence of wavelength upon the main control parameters. The value of wavelength divided by wavelength in vacuum gives a direct measure of the amplitude of nonuniformities induced by the standing wave effect. The models limitation and possible area of improvement were also discussed.

AB - Two different global discharge models was coupled to a transmission line model to obtain the self consistent characteristics of the standing wave effect. A hamiltonian description was used to obtain an analytical expression for the wavelength and to determine the dependence of wavelength upon the main control parameters. The value of wavelength divided by wavelength in vacuum gives a direct measure of the amplitude of nonuniformities induced by the standing wave effect. The models limitation and possible area of improvement were also discussed.

U2 - 10.1063/1.1688334

DO - 10.1063/1.1688334

M3 - Article

AN - SCOPUS:2942608204

SN - 1070-664X

VL - 11

SP - 1775

EP - 1785

JO - Physics of Plasmas

JF - Physics of Plasmas

IS - 5 PART 1

ER -

Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge

Abstract

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