Abstract
We have used slow positron beam-based positron lifetime spectroscopy to study positron diffusion in thick epitaxial n-type 6H-SiC layers. The layers are considerably thicker than the maximum positron penetration depth, and can therefore, be treated as homogeneous semi-infinite bulk material in an analysis including the time-dependent diffusion of a single group of probe particles. Temperature-dependent measurements show a reduction in positron diffusion at low temperatures, which has been interpreted by an increase in trapping to negatively charged defect states.
| Original language | English |
|---|---|
| Pages (from-to) | 122-126 |
| Number of pages | 5 |
| Journal | Applied Surface Science |
| Volume | 194 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - 21 Jun 2002 |
| Event | 9th International Workshop on Slow Positron Beam Techniques - Dresden, Germany Duration: 16 Sept 2001 → 22 Sept 2001 |
Keywords
- Diffusion
- Native defects
- Positron lifetime
- SiC
- Trapping
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