Similarity law for rf breakdown

  • V. Lisovskiy
  • , J. P. Booth
  • , K. Landry
  • , D. Douai
  • , V. Cassagne
  • , V. Yegorenkov

Research output: Contribution to journalArticlepeer-review

Abstract

This paper demonstrates that the similarity law for the rf gas breakdown has the form Urf=ψ(p·L,L/R,f·L)(where U rf is the rf breakdown voltage, p is the gas pressure, L and R are the length and diameter of the discharge tube, respectively, f is the frequency of the rf electric field). It means that two rf breakdown curves registered for narrow inter-electrode gaps or in geometrically similar tubes and depicted in the Urf(p·L) graph will coincide only when the condition f·L=const is met. This similarity law follows from the rf gas breakdown equation and it is well supported by the results of measurements.

Original languageEnglish
Article number15001
JournalEPL
Volume82
Issue number1
DOIs
Publication statusPublished - 1 Apr 2008

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