Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Koki Watanabe; Jaromír Pištora; Martin Foldyna; Kamil Postava; Jaroslav Vlček

doi:10.1109/mmet.2004.1397097

Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Koki Watanabe
, Jaromír Pištora
, Martin Foldyna
, Kamil Postava
, Jaroslav Vlček

Research output: Contribution to conference › Paper › peer-review

Abstract

Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.

Original language	English
Pages	501-503
Number of pages	3
DOIs	https://doi.org/10.1109/mmet.2004.1397097
Publication status	Published - 1 Jan 2004
Externally published	Yes
Event	Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04 - Dniepropetrovsk, Ukraine Duration: 14 Sept 2004 → 17 Sept 2004

Conference

Conference	Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04
Country/Territory	Ukraine
City	Dniepropetrovsk
Period	14/09/04 → 17/09/04

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10.1109/mmet.2004.1397097

Cite this

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title = "Simulation of spectroscopic ellipsometry for dielectric lamellar gratings",

abstract = "Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.",

author = "Koki Watanabe and Jarom{\'i}r Pi{\v s}tora and Martin Foldyna and Kamil Postava and Jaroslav Vl{\v c}ek",

year = "2004",

month = jan,

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doi = "10.1109/mmet.2004.1397097",

language = "English",

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note = "Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04 ; Conference date: 14-09-2004 Through 17-09-2004",

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Watanabe, K, Pištora, J, Foldyna, M, Postava, K & Vlček, J 2004, 'Simulation of spectroscopic ellipsometry for dielectric lamellar gratings', Paper presented at Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04, Dniepropetrovsk, Ukraine, 14/09/04 - 17/09/04 pp. 501-503. https://doi.org/10.1109/mmet.2004.1397097

Simulation of spectroscopic ellipsometry for dielectric lamellar gratings. / Watanabe, Koki; Pištora, Jaromír; Foldyna, Martin et al.
2004. 501-503 Paper presented at Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04, Dniepropetrovsk, Ukraine.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

AU - Watanabe, Koki

AU - Pištora, Jaromír

AU - Foldyna, Martin

AU - Postava, Kamil

AU - Vlček, Jaroslav

PY - 2004/1/1

Y1 - 2004/1/1

N2 - Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.

AB - Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.

U2 - 10.1109/mmet.2004.1397097

DO - 10.1109/mmet.2004.1397097

M3 - Paper

AN - SCOPUS:13344284588

SP - 501

EP - 503

T2 - Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04

Y2 - 14 September 2004 through 17 September 2004

ER -

Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Abstract

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