Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization

O. De La Rochefoucauld; M. Piponnier; F. Harms; G. Dovillaire; X. Levecq; M. Idir; L. Raimondi; P. Zeitoun

doi:10.1364/EUVXRAY.2020.ETh1A.2

Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization

O. De La Rochefoucauld
, M. Piponnier
, F. Harms
, G. Dovillaire
, X. Levecq
, M. Idir
, L. Raimondi
, P. Zeitoun

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present Hartmann wavefront sensors as versatile metrology tools to provide realtime characterization and optimization of sources as well as easy, at lambda optical alignment, on a spectral range from EUV to hard X-Ray.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources, EUVXRAY 2020
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781943580736
DOIs	https://doi.org/10.1364/EUVXRAY.2020.ETh1A.2
Publication status	Published - 16 Nov 2020
Event	2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020 - Washington, United States Duration: 16 Nov 2020 → 20 Nov 2020

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020
Country/Territory	United States
City	Washington
Period	16/11/20 → 20/11/20

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10.1364/EUVXRAY.2020.ETh1A.2

Cite this

De La Rochefoucauld, O., Piponnier, M., Harms, F., Dovillaire, G., Levecq, X., Idir, M., Raimondi, L., & Zeitoun, P. (2020). Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization. In Compact EUV and X-ray Light Sources, EUVXRAY 2020 Article ETh1A.2 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/EUVXRAY.2020.ETh1A.2

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title = "Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization",

abstract = "We present Hartmann wavefront sensors as versatile metrology tools to provide realtime characterization and optimization of sources as well as easy, at lambda optical alignment, on a spectral range from EUV to hard X-Ray.",

author = "\{De La Rochefoucauld\}, O. and M. Piponnier and F. Harms and G. Dovillaire and X. Levecq and M. Idir and L. Raimondi and P. Zeitoun",

note = "Publisher Copyright: {\textcopyright} 2020 OSA - The Optical Society. All rights reserved.; 2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020 ; Conference date: 16-11-2020 Through 20-11-2020",

year = "2020",

month = nov,

day = "16",

doi = "10.1364/EUVXRAY.2020.ETh1A.2",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Compact EUV and X-ray Light Sources, EUVXRAY 2020",

}

De La Rochefoucauld, O, Piponnier, M, Harms, F, Dovillaire, G, Levecq, X, Idir, M, Raimondi, L & Zeitoun, P 2020, Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization. in Compact EUV and X-ray Light Sources, EUVXRAY 2020., ETh1A.2, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), 2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020, Washington, United States, 16/11/20. https://doi.org/10.1364/EUVXRAY.2020.ETh1A.2

Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization. / De La Rochefoucauld, O.; Piponnier, M.; Harms, F. et al.
Compact EUV and X-ray Light Sources, EUVXRAY 2020. Optica Publishing Group (formerly OSA), 2020. ETh1A.2 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization

AU - De La Rochefoucauld, O.

AU - Piponnier, M.

AU - Harms, F.

AU - Dovillaire, G.

AU - Levecq, X.

AU - Idir, M.

AU - Raimondi, L.

AU - Zeitoun, P.

PY - 2020/11/16

Y1 - 2020/11/16

N2 - We present Hartmann wavefront sensors as versatile metrology tools to provide realtime characterization and optimization of sources as well as easy, at lambda optical alignment, on a spectral range from EUV to hard X-Ray.

AB - We present Hartmann wavefront sensors as versatile metrology tools to provide realtime characterization and optimization of sources as well as easy, at lambda optical alignment, on a spectral range from EUV to hard X-Ray.

UR - https://www.scopus.com/pages/publications/85102238306

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DO - 10.1364/EUVXRAY.2020.ETh1A.2

M3 - Conference contribution

AN - SCOPUS:85102238306

T3 - Optics InfoBase Conference Papers

BT - Compact EUV and X-ray Light Sources, EUVXRAY 2020

PB - Optica Publishing Group (formerly OSA)

T2 - 2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020

Y2 - 16 November 2020 through 20 November 2020

ER -

De La Rochefoucauld O, Piponnier M, Harms F, Dovillaire G, Levecq X, Idir M et al. Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization. In Compact EUV and X-ray Light Sources, EUVXRAY 2020. Optica Publishing Group (formerly OSA). 2020. ETh1A.2. (Optics InfoBase Conference Papers). doi: 10.1364/EUVXRAY.2020.ETh1A.2

Single-shot, self-calibrated, real-Time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization

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