Stable and unstable behavior of inductively coupled electronegative discharges

A. M. Marakhtanov; M. Tuszewski; M. A. Lieberman; A. J. Lichtenberg; P. Chabert

doi:10.1116/1.1613953

Stable and unstable behavior of inductively coupled electronegative discharges

A. M. Marakhtanov
, M. Tuszewski
, M. A. Lieberman
, A. J. Lichtenberg
, P. Chabert

Research output: Contribution to journal › Article › peer-review

Abstract

Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF₆ or Ar/SF₆ mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.

Original language	English
Pages (from-to)	1849-1864
Number of pages	16
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1613953
Publication status	Published - 1 Nov 2003

Access to Document

10.1116/1.1613953

Cite this

@article{cf760a9b335e495195e3116be32904d9,

title = "Stable and unstable behavior of inductively coupled electronegative discharges",

abstract = "Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF6 or Ar/SF6 mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.",

author = "Marakhtanov, \{A. M.\} and M. Tuszewski and Lieberman, \{M. A.\} and Lichtenberg, \{A. J.\} and P. Chabert",

year = "2003",

month = nov,

day = "1",

doi = "10.1116/1.1613953",

language = "English",

volume = "21",

pages = "1849--1864",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

number = "6",

}

TY - JOUR

T1 - Stable and unstable behavior of inductively coupled electronegative discharges

AU - Marakhtanov, A. M.

AU - Tuszewski, M.

AU - Lieberman, M. A.

AU - Lichtenberg, A. J.

AU - Chabert, P.

PY - 2003/11/1

Y1 - 2003/11/1

N2 - Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF6 or Ar/SF6 mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.

AB - Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF6 or Ar/SF6 mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.

U2 - 10.1116/1.1613953

DO - 10.1116/1.1613953

M3 - Article

AN - SCOPUS:0842290169

SN - 0734-2101

VL - 21

SP - 1849

EP - 1864

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

ER -

Stable and unstable behavior of inductively coupled electronegative discharges

Abstract

Access to Document

Fingerprint

Cite this