Strain engineering in germanium microdisks

  • A. Ghrib
  • , M. El Kurdi
  • , M. Prost
  • , M. De Kersauson
  • , L. Largeau
  • , O. Mauguin
  • , G. Beaudoin
  • , S. Sauvage
  • , X. Checoury
  • , G. Ndong
  • , M. Chaigneau
  • , R. Ossikovski
  • , S. David
  • , I. Sagnes
  • , P. Boucaud

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The keystone to realize a monolithic integrated source on silicon with germanium is to optimize tensile strain and n-doping. In order to realize an integrated compact source, we demonstrate highly strained n-doped germanium microdisks obtained by two approaches using initially compressed silicon nitride (SiN) deposition. In the first approach, the microdisks are fabricated from relaxed Ge. In a second approach, we use tensile-strained Ge grown on a mismatched buffer layer, thus increasing the global strain in the Ge volume and lowering its gradient. A photoluminescence red-shift up to 450 nm is observed, corresponding to more than 1% biaxial strain.

Original languageEnglish
Title of host publicationSilicon Photonics IX
PublisherSPIE
ISBN (Print)9780819499035
DOIs
Publication statusPublished - 1 Jan 2014
EventSilicon Photonics IX - San Francisco, CA, United States
Duration: 3 Feb 20145 Feb 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8990
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceSilicon Photonics IX
Country/TerritoryUnited States
CitySan Francisco, CA
Period3/02/145/02/14

Keywords

  • Germanium
  • Microdisks
  • Optical resonators
  • Photoluminescence
  • Semi-conductor strain engineering
  • Silicon photonics
  • Whispering gallery modes

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