Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm

Julien Gautier; Franck Delmotte; Marc Roulliay; Françoise Bridou; Marie Françoise Ravet; Arnaud Jérome

doi:10.1364/AO.44.000384

Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm

Julien Gautier, Franck Delmotte, Marc Roulliay, Françoise Bridou, Marie Françoise Ravet, Arnaud Jérome

Laboratoire Charles Fabry

Research output: Contribution to journal › Article › peer-review

Abstract

We study theoretically and experimentally the increase of normal incidence reflectivity generated by addition of a third material in the period of a standard periodic multilayer, for wavelengths in the range 20 to 40 nm. The nature and thickness of the three materials has been optimized to provide the best enhancement of reflectivity. Theoretical reflectivity of an optimized B₄C/Mo/Si multilayer reaches 42% at 32 nm. B₄C/Mo/Si multilayers have been deposited with a magnetron sputtering system and a reflectivity of 34% at 32 nm has been measured on a synchrotron radiation source.

Original language	English
Pages (from-to)	384-390
Number of pages	7
Journal	Applied Optics
Volume	44
Issue number	3
DOIs	https://doi.org/10.1364/AO.44.000384
Publication status	Published - 20 Jan 2005
Externally published	Yes

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abstract = "We study theoretically and experimentally the increase of normal incidence reflectivity generated by addition of a third material in the period of a standard periodic multilayer, for wavelengths in the range 20 to 40 nm. The nature and thickness of the three materials has been optimized to provide the best enhancement of reflectivity. Theoretical reflectivity of an optimized B4C/Mo/Si multilayer reaches 42\% at 32 nm. B4C/Mo/Si multilayers have been deposited with a magnetron sputtering system and a reflectivity of 34\% at 32 nm has been measured on a synchrotron radiation source.",

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AU - Gautier, Julien

AU - Delmotte, Franck

AU - Roulliay, Marc

AU - Bridou, Françoise

AU - Ravet, Marie Françoise

AU - Jérome, Arnaud

PY - 2005/1/20

Y1 - 2005/1/20

N2 - We study theoretically and experimentally the increase of normal incidence reflectivity generated by addition of a third material in the period of a standard periodic multilayer, for wavelengths in the range 20 to 40 nm. The nature and thickness of the three materials has been optimized to provide the best enhancement of reflectivity. Theoretical reflectivity of an optimized B4C/Mo/Si multilayer reaches 42% at 32 nm. B4C/Mo/Si multilayers have been deposited with a magnetron sputtering system and a reflectivity of 34% at 32 nm has been measured on a synchrotron radiation source.

AB - We study theoretically and experimentally the increase of normal incidence reflectivity generated by addition of a third material in the period of a standard periodic multilayer, for wavelengths in the range 20 to 40 nm. The nature and thickness of the three materials has been optimized to provide the best enhancement of reflectivity. Theoretical reflectivity of an optimized B4C/Mo/Si multilayer reaches 42% at 32 nm. B4C/Mo/Si multilayers have been deposited with a magnetron sputtering system and a reflectivity of 34% at 32 nm has been measured on a synchrotron radiation source.

U2 - 10.1364/AO.44.000384

DO - 10.1364/AO.44.000384

M3 - Article

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EP - 390

JO - Applied Optics

JF - Applied Optics

IS - 3

ER -

Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm

Abstract

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