Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas

Th Nguyen-Tran; P. Roca I Cabarrocas; G. Patriarche

doi:10.1063/1.2784294

Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas

Th Nguyen-Tran
, P. Roca I Cabarrocas
, G. Patriarche

Research output: Contribution to journal › Article › peer-review

Abstract

The growth of silicon nanocrystals in high pressure and high dilution silane plasmas is investigated by using the temporal evolution of the self-bias on the radio frequency electrode and transmission electron microscopy. A square-wave-modulated plasma was used in order to control the growth of monodispersed nanoparticles with sizes smaller than 12 nm. To this end, the plasma on time was kept below 1 s. The radial growth rate of nanoparticles was varied in the range from 7.5 to 75 nms by changing silane partial pressure. Nanoparticles grown in silane-helium discharges have been found amorphous while they are crystalline in silane-hydrogen-argon discharges. Surprisingly, the crystallization in the gaseous phase does not depend on how slow or fast the particles grow but on the presence of atomic hydrogen.

Original language	English
Article number	111501
Journal	Applied Physics Letters
Volume	91
Issue number	11
DOIs	https://doi.org/10.1063/1.2784294
Publication status	Published - 21 Sept 2007

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title = "Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas",

abstract = "The growth of silicon nanocrystals in high pressure and high dilution silane plasmas is investigated by using the temporal evolution of the self-bias on the radio frequency electrode and transmission electron microscopy. A square-wave-modulated plasma was used in order to control the growth of monodispersed nanoparticles with sizes smaller than 12 nm. To this end, the plasma on time was kept below 1 s. The radial growth rate of nanoparticles was varied in the range from 7.5 to 75 nms by changing silane partial pressure. Nanoparticles grown in silane-helium discharges have been found amorphous while they are crystalline in silane-hydrogen-argon discharges. Surprisingly, the crystallization in the gaseous phase does not depend on how slow or fast the particles grow but on the presence of atomic hydrogen.",

author = "Th Nguyen-Tran and \{Roca I Cabarrocas\}, P. and G. Patriarche",

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AU - Nguyen-Tran, Th

AU - Roca I Cabarrocas, P.

AU - Patriarche, G.

PY - 2007/9/21

Y1 - 2007/9/21

N2 - The growth of silicon nanocrystals in high pressure and high dilution silane plasmas is investigated by using the temporal evolution of the self-bias on the radio frequency electrode and transmission electron microscopy. A square-wave-modulated plasma was used in order to control the growth of monodispersed nanoparticles with sizes smaller than 12 nm. To this end, the plasma on time was kept below 1 s. The radial growth rate of nanoparticles was varied in the range from 7.5 to 75 nms by changing silane partial pressure. Nanoparticles grown in silane-helium discharges have been found amorphous while they are crystalline in silane-hydrogen-argon discharges. Surprisingly, the crystallization in the gaseous phase does not depend on how slow or fast the particles grow but on the presence of atomic hydrogen.

AB - The growth of silicon nanocrystals in high pressure and high dilution silane plasmas is investigated by using the temporal evolution of the self-bias on the radio frequency electrode and transmission electron microscopy. A square-wave-modulated plasma was used in order to control the growth of monodispersed nanoparticles with sizes smaller than 12 nm. To this end, the plasma on time was kept below 1 s. The radial growth rate of nanoparticles was varied in the range from 7.5 to 75 nms by changing silane partial pressure. Nanoparticles grown in silane-helium discharges have been found amorphous while they are crystalline in silane-hydrogen-argon discharges. Surprisingly, the crystallization in the gaseous phase does not depend on how slow or fast the particles grow but on the presence of atomic hydrogen.

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DO - 10.1063/1.2784294

M3 - Article

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SN - 0003-6951

VL - 91

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

M1 - 111501

ER -

Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas

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