Study of the effects of different fractions of large grains of μc-Si:H:F films on the infrared absorption on thin film solar cells

M. Moreno, R. Boubekri, P. Roca I Cabarrocas

Research output: Contribution to journalArticlepeer-review

Abstract

We have studied microcrystalline silicon films (μc-Si:H:F) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) at low temperature (∼200 °C) from SiF 4, H 2 and Ar gas mixtures. We found that the H 2/SiF 4 ratio plays an important role on the crystalline fraction of the films, specifically on the films grain size, deduced from UVvis spectroscopic ellipsometry. We observed that higher crystallinity (and larger fraction of large-grains) in the films provides a higher absorption on the infrared (IR) region, which is of particular interest for tandem solar cells. PIN solar cells were fabricated with intrinsic μc-Si:H:F films of different crystallinity (and different fraction of large grains) in order to observe their effect on the solar cells IR absorption and on the cells performance characteristics.

Original languageEnglish
Pages (from-to)16-20
Number of pages5
JournalSolar Energy Materials and Solar Cells
Volume100
DOIs
Publication statusPublished - 1 May 2012

Keywords

  • PECVD
  • Plasma
  • Solar cells
  • Thin films

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