Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

A. Hofrichter; A. Constantinescu; S. Benayoun; P. Bulkin; B. Drévillon

doi:10.1116/1.582464

Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

A. Hofrichter
, A. Constantinescu
, S. Benayoun
, P. Bulkin
, B. Drévillon

Institut polytechnique de Paris
Department of Mechanics École Polytechnique
ENSAM Lille Lab. Metall. Phys. l'U.

Research output: Contribution to journal › Conference article › peer-review

Abstract

Amorphous hydrogenated silica films were plasma-deposited on polycarbonate, stainless steel, and silicon. Macroindentation tests and finite element modeling were performed to study the mechanical properties of the films. About 4 GPa was found to be the yield limit of the plasma-deposited films.

Original language	English
Pages (from-to)	2012-2016
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	18
Issue number	4 II
DOIs	https://doi.org/10.1116/1.582464
Publication status	Published - 1 Jul 2000
Externally published	Yes
Event	46th National Symposium of the American Vacuum Society - Seatlle, WA, USA Duration: 25 Oct 1999 → 29 Oct 1999

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@article{c91e899d49134fb590c84c4ef4766f1c,

title = "Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel",

abstract = "Amorphous hydrogenated silica films were plasma-deposited on polycarbonate, stainless steel, and silicon. Macroindentation tests and finite element modeling were performed to study the mechanical properties of the films. About 4 GPa was found to be the yield limit of the plasma-deposited films.",

author = "A. Hofrichter and A. Constantinescu and S. Benayoun and P. Bulkin and B. Dr{\'e}villon",

year = "2000",

month = jul,

day = "1",

doi = "10.1116/1.582464",

language = "English",

volume = "18",

pages = "2012--2016",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

number = "4 II",

note = "46th National Symposium of the American Vacuum Society ; Conference date: 25-10-1999 Through 29-10-1999",

}

TY - JOUR

T1 - Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

AU - Hofrichter, A.

AU - Constantinescu, A.

AU - Benayoun, S.

AU - Bulkin, P.

AU - Drévillon, B.

PY - 2000/7/1

Y1 - 2000/7/1

N2 - Amorphous hydrogenated silica films were plasma-deposited on polycarbonate, stainless steel, and silicon. Macroindentation tests and finite element modeling were performed to study the mechanical properties of the films. About 4 GPa was found to be the yield limit of the plasma-deposited films.

AB - Amorphous hydrogenated silica films were plasma-deposited on polycarbonate, stainless steel, and silicon. Macroindentation tests and finite element modeling were performed to study the mechanical properties of the films. About 4 GPa was found to be the yield limit of the plasma-deposited films.

U2 - 10.1116/1.582464

DO - 10.1116/1.582464

M3 - Conference article

AN - SCOPUS:0034227690

SN - 0734-2101

VL - 18

SP - 2012

EP - 2016

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4 II

T2 - 46th National Symposium of the American Vacuum Society

Y2 - 25 October 1999 through 29 October 1999

ER -

Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

Abstract

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