Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics

Anne Sophie Morlens; Julien Gautier; Gilles Rey; Philippe Zeitoun; Jean Pascal Caumes; Marylène Kos-Rosset; Hamed Merdji; Sophie Kazamias; Kevin Cassou; Marta Fajardo

doi:10.1364/OL.31.003095

Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics

Anne Sophie Morlens
, Julien Gautier
, Gilles Rey
, Philippe Zeitoun
, Jean Pascal Caumes
, Marylène Kos-Rosset
, Hamed Merdji
, Sophie Kazamias
, Kevin Cassou
, Marta Fajardo

Laboratory d'Optique Appliquée, ENSTA, CNRS-École Polytechnique
Institut Pierre Simon Laplace, CNRS and CEA
Université Paris-Saclay
Instituto Superior Técnico

Research output: Contribution to journal › Article › peer-review

Abstract

Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 μm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.

Original language	English
Pages (from-to)	3095-3097
Number of pages	3
Journal	Optics Letters
Volume	31
Issue number	21
DOIs	https://doi.org/10.1364/OL.31.003095
Publication status	Published - 1 Nov 2006

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10.1364/OL.31.003095

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title = "Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics",

abstract = "Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 μm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.",

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AU - Morlens, Anne Sophie

AU - Gautier, Julien

AU - Rey, Gilles

AU - Zeitoun, Philippe

AU - Caumes, Jean Pascal

AU - Kos-Rosset, Marylène

AU - Merdji, Hamed

AU - Kazamias, Sophie

AU - Cassou, Kevin

AU - Fajardo, Marta

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N2 - Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 μm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.

AB - Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 μm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.

UR - https://www.scopus.com/pages/publications/33751346671

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EP - 3097

JO - Optics Letters

JF - Optics Letters

IS - 21

ER -

Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics

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