Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach

The standing wave effect in high frequency capacitive discharges was analyzed using a self-consistent model. The standing wave wavelength was found to be reduced when a plasma presents between two parallel plate electrodes. The plasma induced effects include the voltage drop within the dielectric lens and a deviation from the ideal Gaussian calculated profile. It was concluded that a maximum of the low frequency voltage was expected near the edge to obtain uniformity of the high frequency voltage.