Symmetry plays a key role in the erasing of patterned surface features

Michael Benzaquen, Mark Ilton, Michael V. Massa, Thomas Salez, Paul Fowler, Elie Raphaël, Kari Dalnoki-Veress

Research output: Contribution to journalArticlepeer-review

Abstract

We report on how the relaxation of patterns prepared on a thin film can be controlled by manipulating the symmetry of the initial shape. The validity of a lubrication theory for the capillary-driven relaxation of surface profiles is verified by atomic force microscopy measurements, performed on films that were patterned using focused laser spike annealing. In particular, we observe that the shape of the surface profile at late times is entirely determined by the initial symmetry of the perturbation, in agreement with the theory. The results have relevance in the dynamical control of topographic perturbations for nanolithography and high density memory storage.

Original languageEnglish
Article number053103
JournalApplied Physics Letters
Volume107
Issue number5
DOIs
Publication statusPublished - 3 Aug 2015
Externally publishedYes

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