Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions

M. Guláš; C. S. Cojocaru; C. T. Fleaca; S. Farhat; P. Veis; F. Le Normand

doi:10.1051/epjap:2008111

Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions

M. Guláš
, C. S. Cojocaru
, C. T. Fleaca
, S. Farhat
, P. Veis
, F. Le Normand

Research output: Contribution to journal › Article › peer-review

Abstract

To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

Original language	English
Pages (from-to)	353-356
Number of pages	4
Journal	EPJ Applied Physics
Volume	43
Issue number	3
DOIs	https://doi.org/10.1051/epjap:2008111
Publication status	Published - 1 Sept 2008
Externally published	Yes

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10.1051/epjap:2008111

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abstract = "To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.",

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AU - Guláš, M.

AU - Cojocaru, C. S.

AU - Fleaca, C. T.

AU - Farhat, S.

AU - Veis, P.

AU - Le Normand, F.

PY - 2008/9/1

Y1 - 2008/9/1

N2 - To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

AB - To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

UR - https://www.scopus.com/pages/publications/50849108223

U2 - 10.1051/epjap:2008111

DO - 10.1051/epjap:2008111

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SP - 353

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Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions

Abstract

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