Abstract
We present an analytical transmission electron microscopy (TEM, EDX microanalysis) study of cobalt clusters embedded in amorphous alumina thin films. We derived the size (average and standard deviation) and the density of clusters from the quantitative analysis of images taken at different defocus values. We additionally measured the cobalt/aluminum ratio by EDX and deduced the density of the amorphous alumina from the comparison of these results with thickness data.
| Original language | English |
|---|---|
| Pages (from-to) | 120-123 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 319 |
| Issue number | 1-2 |
| DOIs | |
| Publication status | Published - 29 Apr 1998 |
| Externally published | Yes |
Keywords
- Amorphous alumina
- Cobalt clusters
- Transmission electron microscopy
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