The role of catalytic nanoparticle pretreatment on the growth of vertically aligned carbon nanotubes by hot-filament chemical vapor deposition

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Abstract

The effect of atomic hydrogen assisted pre-treatment on the growth of vertically aligned carbon nanotubes using hot-filament chemical vapor deposition was investigated. Iron nanoparticle catalysts were formed on an aluminum oxide support layer by spraying of iron chloride salt solutions as catalyst precursor. It is found that pre-treatment time and process temperature tune the density as well as the shape and the structure of the grown car nanotubes. An optimum pre-treatment time can be found for the growth of long and well aligned carbon nanotubes, densely packed to each other. To provide insight on this behavior, the iron catalytic nanoparticles formed after the atomic hydrogen assisted pre-treatment were analyzed by atomic force microscopy. The relations between the size and the density of the as-formed catalyst and the as-grown carbon nanotube's structure and density are discussed.

Original languageEnglish
Pages (from-to)84-91
Number of pages8
JournalThin Solid Films
Volume575
DOIs
Publication statusPublished - 30 Jan 2015

Keywords

  • Atomic hydrogen
  • Carbon nanotube
  • Catalytic nanoparticle
  • Hot filament chemical vapor deposition
  • Pretreatement

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