Thermal characterisation of microelectronics materials at various scales

D. Fournier; L. Pottier; K. Plamann; C. Pelissonnier; A. Thorel; F. Queyroux

Thermal characterisation of microelectronics materials at various scales

D. Fournier
, L. Pottier
, K. Plamann
, C. Pelissonnier
, A. Thorel
, F. Queyroux

PSL Research University
ENSMP

Research output: Contribution to journal › Article › peer-review

Abstract

It is of importance to characterize ceramics devoted to microelectronics applications such as polycristalline diamond, AlN and Al₂O₃ at various scales. Photothermal experiments will be shown as efficient experimental probes.

Original language	English
Pages (from-to)	S467-S470
Journal	Progress in Natural Science
Volume	6
Issue number	SPEC. ISS.
Publication status	Published - 1 Jan 1996
Externally published	Yes

Cite this

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title = "Thermal characterisation of microelectronics materials at various scales",

abstract = "It is of importance to characterize ceramics devoted to microelectronics applications such as polycristalline diamond, AlN and Al2O3 at various scales. Photothermal experiments will be shown as efficient experimental probes.",

author = "D. Fournier and L. Pottier and K. Plamann and C. Pelissonnier and A. Thorel and F. Queyroux",

year = "1996",

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T1 - Thermal characterisation of microelectronics materials at various scales

AU - Fournier, D.

AU - Pottier, L.

AU - Plamann, K.

AU - Pelissonnier, C.

AU - Thorel, A.

AU - Queyroux, F.

PY - 1996/1/1

Y1 - 1996/1/1

N2 - It is of importance to characterize ceramics devoted to microelectronics applications such as polycristalline diamond, AlN and Al2O3 at various scales. Photothermal experiments will be shown as efficient experimental probes.

AB - It is of importance to characterize ceramics devoted to microelectronics applications such as polycristalline diamond, AlN and Al2O3 at various scales. Photothermal experiments will be shown as efficient experimental probes.

M3 - Article

AN - SCOPUS:20544477871

SN - 1002-0071

VL - 6

SP - S467-S470

JO - Progress in Natural Science

JF - Progress in Natural Science

IS - SPEC. ISS.

ER -

Thermal characterisation of microelectronics materials at various scales

Abstract

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