@inproceedings{3b0845e1dc90472bb96b9c2c4ed357f6,
title = "Thermal infrared optical metrology using quadri-wave lateral shearing interferometry",
abstract = "We present the application of Quadri-Wave Lateral Shearing Interferometry (QWLSI), a wave front sensing technique, to characterize thermal infrared lenses for wavelengths within 8 and 14μm. Wave front sensing is not only a tool to quantify optical quality, but also to map the local (dust, scratches) or global possible defects. This method offers the crucial advantage that it yields an analyzed wave front without the use of a reference arm and consequent time consuming alignment. Moreover thanks to the acceptance of QWLSI to high numerical aperture beams, no additional optics is required. This makes lens characterization convenient and very fast. We particularly show the experimental characterization of single Germanium lens and finally present the characterization of complex optical imaging systems for high-performance infrared cameras. The analysis is made in conditions that are very close to the usual conditions of the camera use; that is to say, directly in the convergent beam and in polychromatic (black body) light.",
keywords = "Infrared, MTF, Optical metrology, PSF, Thermal imaging, Wave front sensing",
author = "Sabrina Velghe and Djamel Brahmi and William Boucher and Benoit Wattellier and Nicolas Gu{\'e}rineau and Riad Ha{\"i}dar and J{\'e}ro{\^a}me Primot",
year = "2008",
month = dec,
day = "19",
doi = "10.1117/12.800325",
language = "English",
isbn = "9780819473455",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Electro-Optical and Infrared Systems",
note = "Electro-Optical and Infrared Systems: Technology and Applications V ; Conference date: 16-09-2008 Through 18-09-2008",
}