Thermal noise measurements on micro-cantilevers coated with dielectric materials

Gianpietro Cagnoli; Vincent Dolique; Jerome Degallaix; Raffaele Flaminio; Daniele Forest; Massimo Granata; Christophe Michel; Nazario Morgado; Laurent Pinard; Felipe Aguilar; Tianjun Li; Mickael Geitner; Ludovic Bellon

doi:10.1109/ICNF.2013.6578891

Thermal noise measurements on micro-cantilevers coated with dielectric materials

Gianpietro Cagnoli, Vincent Dolique, Jerome Degallaix, Raffaele Flaminio, Daniele Forest, Massimo Granata, Christophe Michel, Nazario Morgado, Laurent Pinard, Felipe Aguilar, Tianjun Li, Mickael Geitner, Ludovic Bellon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In recent years an increasing number of devices and experiments are shown to be limited by mechanical thermal noise. In particular sub-Hertz laser frequency stabilization and gravitational wave detectors, that are able to measure fluctuations of 10^-18 m/√Hz or less, are being limited by thermal noise in the dielectric coatings deposited on mirrors. We present a novel technique of structural relaxation analysis based on the direct thermal noise measurements on micro-cantilevers and we compare it with the results obtained from the mechanical loss measurements. The dielectric coatings are deposited by ion beam sputtering. The results presented here give a loss angle of annealed tantala and as-deposited silica coatings of (3.9 ± 0.4) ṡ 10^-4 and (5.8 ± 1.0) ṡ 10^-4 respectively, from 10 Hz to 20 kHz.

Original language	English
Title of host publication	2013 22nd International Conference on Noise and Fluctuations, ICNF 2013
DOIs	https://doi.org/10.1109/ICNF.2013.6578891
Publication status	Published - 16 Sept 2013
Externally published	Yes
Event	2013 22nd International Conference on Noise and Fluctuations, ICNF 2013 - Montpellier, France Duration: 24 Jun 2013 → 28 Jun 2013

Publication series

Name	2013 22nd International Conference on Noise and Fluctuations, ICNF 2013

Conference

Conference	2013 22nd International Conference on Noise and Fluctuations, ICNF 2013
Country/Territory	France
City	Montpellier
Period	24/06/13 → 28/06/13

Access to Document

10.1109/ICNF.2013.6578891

Cite this

Cagnoli, G., Dolique, V., Degallaix, J., Flaminio, R., Forest, D., Granata, M., Michel, C., Morgado, N., Pinard, L., Aguilar, F., Li, T., Geitner, M., & Bellon, L. (2013). Thermal noise measurements on micro-cantilevers coated with dielectric materials. In 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013 Article 6578891 (2013 22nd International Conference on Noise and Fluctuations, ICNF 2013). https://doi.org/10.1109/ICNF.2013.6578891

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title = "Thermal noise measurements on micro-cantilevers coated with dielectric materials",

abstract = "In recent years an increasing number of devices and experiments are shown to be limited by mechanical thermal noise. In particular sub-Hertz laser frequency stabilization and gravitational wave detectors, that are able to measure fluctuations of 10-18 m/√Hz or less, are being limited by thermal noise in the dielectric coatings deposited on mirrors. We present a novel technique of structural relaxation analysis based on the direct thermal noise measurements on micro-cantilevers and we compare it with the results obtained from the mechanical loss measurements. The dielectric coatings are deposited by ion beam sputtering. The results presented here give a loss angle of annealed tantala and as-deposited silica coatings of (3.9 ± 0.4) ṡ 10-4 and (5.8 ± 1.0) ṡ 10-4 respectively, from 10 Hz to 20 kHz.",

author = "Gianpietro Cagnoli and Vincent Dolique and Jerome Degallaix and Raffaele Flaminio and Daniele Forest and Massimo Granata and Christophe Michel and Nazario Morgado and Laurent Pinard and Felipe Aguilar and Tianjun Li and Mickael Geitner and Ludovic Bellon",

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doi = "10.1109/ICNF.2013.6578891",

language = "English",

isbn = "9781479906680",

series = "2013 22nd International Conference on Noise and Fluctuations, ICNF 2013",

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note = "2013 22nd International Conference on Noise and Fluctuations, ICNF 2013 ; Conference date: 24-06-2013 Through 28-06-2013",

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Cagnoli, G, Dolique, V, Degallaix, J, Flaminio, R, Forest, D, Granata, M, Michel, C, Morgado, N, Pinard, L, Aguilar, F, Li, T, Geitner, M & Bellon, L 2013, Thermal noise measurements on micro-cantilevers coated with dielectric materials. in 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013., 6578891, 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013, 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013, Montpellier, France, 24/06/13. https://doi.org/10.1109/ICNF.2013.6578891

Thermal noise measurements on micro-cantilevers coated with dielectric materials. / Cagnoli, Gianpietro; Dolique, Vincent; Degallaix, Jerome et al.
2013 22nd International Conference on Noise and Fluctuations, ICNF 2013. 2013. 6578891 (2013 22nd International Conference on Noise and Fluctuations, ICNF 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Thermal noise measurements on micro-cantilevers coated with dielectric materials

AU - Cagnoli, Gianpietro

AU - Dolique, Vincent

AU - Degallaix, Jerome

AU - Flaminio, Raffaele

AU - Forest, Daniele

AU - Granata, Massimo

AU - Michel, Christophe

AU - Morgado, Nazario

AU - Pinard, Laurent

AU - Aguilar, Felipe

AU - Li, Tianjun

AU - Geitner, Mickael

AU - Bellon, Ludovic

PY - 2013/9/16

Y1 - 2013/9/16

N2 - In recent years an increasing number of devices and experiments are shown to be limited by mechanical thermal noise. In particular sub-Hertz laser frequency stabilization and gravitational wave detectors, that are able to measure fluctuations of 10-18 m/√Hz or less, are being limited by thermal noise in the dielectric coatings deposited on mirrors. We present a novel technique of structural relaxation analysis based on the direct thermal noise measurements on micro-cantilevers and we compare it with the results obtained from the mechanical loss measurements. The dielectric coatings are deposited by ion beam sputtering. The results presented here give a loss angle of annealed tantala and as-deposited silica coatings of (3.9 ± 0.4) ṡ 10-4 and (5.8 ± 1.0) ṡ 10-4 respectively, from 10 Hz to 20 kHz.

AB - In recent years an increasing number of devices and experiments are shown to be limited by mechanical thermal noise. In particular sub-Hertz laser frequency stabilization and gravitational wave detectors, that are able to measure fluctuations of 10-18 m/√Hz or less, are being limited by thermal noise in the dielectric coatings deposited on mirrors. We present a novel technique of structural relaxation analysis based on the direct thermal noise measurements on micro-cantilevers and we compare it with the results obtained from the mechanical loss measurements. The dielectric coatings are deposited by ion beam sputtering. The results presented here give a loss angle of annealed tantala and as-deposited silica coatings of (3.9 ± 0.4) ṡ 10-4 and (5.8 ± 1.0) ṡ 10-4 respectively, from 10 Hz to 20 kHz.

U2 - 10.1109/ICNF.2013.6578891

DO - 10.1109/ICNF.2013.6578891

M3 - Conference contribution

AN - SCOPUS:84883723848

SN - 9781479906680

T3 - 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013

BT - 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013

T2 - 2013 22nd International Conference on Noise and Fluctuations, ICNF 2013

Y2 - 24 June 2013 through 28 June 2013

ER -

Thermal noise measurements on micro-cantilevers coated with dielectric materials

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