@inproceedings{346306d14167486e80ea8601369535aa,
title = "Thermal noise measurements on micro-cantilevers coated with dielectric materials",
abstract = "In recent years an increasing number of devices and experiments are shown to be limited by mechanical thermal noise. In particular sub-Hertz laser frequency stabilization and gravitational wave detectors, that are able to measure fluctuations of 10-18 m/√Hz or less, are being limited by thermal noise in the dielectric coatings deposited on mirrors. We present a novel technique of structural relaxation analysis based on the direct thermal noise measurements on micro-cantilevers and we compare it with the results obtained from the mechanical loss measurements. The dielectric coatings are deposited by ion beam sputtering. The results presented here give a loss angle of annealed tantala and as-deposited silica coatings of (3.9 ± 0.4) ṡ 10-4 and (5.8 ± 1.0) ṡ 10-4 respectively, from 10 Hz to 20 kHz.",
author = "Gianpietro Cagnoli and Vincent Dolique and Jerome Degallaix and Raffaele Flaminio and Daniele Forest and Massimo Granata and Christophe Michel and Nazario Morgado and Laurent Pinard and Felipe Aguilar and Tianjun Li and Mickael Geitner and Ludovic Bellon",
year = "2013",
month = sep,
day = "16",
doi = "10.1109/ICNF.2013.6578891",
language = "English",
isbn = "9781479906680",
series = "2013 22nd International Conference on Noise and Fluctuations, ICNF 2013",
booktitle = "2013 22nd International Conference on Noise and Fluctuations, ICNF 2013",
note = "2013 22nd International Conference on Noise and Fluctuations, ICNF 2013 ; Conference date: 24-06-2013 Through 28-06-2013",
}