Time-resolved electric-field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy

Jean Paul Booth; Jacques Derouard; Majida Fadlallah; Nader Sadeghi

doi:10.1063/1.354878

Time-resolved electric-field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy

Jean Paul Booth
, Jacques Derouard
, Majida Fadlallah
, Nader Sadeghi

LTHE (UMR 5564 CNRS/IRD/Université de Grenoble)

Research output: Contribution to journal › Article › peer-review

Abstract

The temporal behavior of the cathode sheath in 30 kHz 0.4-1 Torr H ₂ discharges has been investigated by optical emission spectroscopy. Analysis of the Stark splitting of plasma-induced H Balmer delta emission was used to measure the electric field with spatial and temporal resolution in the instantaneous cathode sheath. The location of the plasma/sheath boundary was determined from the position of the maximum of the H₂ d ³Π_u→a ³Σ_g ⁺ (0,0) Q₁ emission at 622.5 nm. Both methods showed that the sheath width increases as the cathode voltage becomes more negative, whereas the width remains constant as the applied voltage drops off. Analysis of the electric-field profile provided information on the time evolution of the ion density close to the electrode during the cathode half-cycle, in agreement with recent numerical calculations. At the beginning of the anodic half-cycle an intense flash of plasma-induced emission was observed, localized within 3 mm from the electrode.

Original language	English
Pages (from-to)	862-867
Number of pages	6
Journal	Journal of Applied Physics
Volume	74
Issue number	2
DOIs	https://doi.org/10.1063/1.354878
Publication status	Published - 1 Jan 1993
Externally published	Yes

Access to Document

10.1063/1.354878

Cite this

@article{d116ebf08ce64bea87a23456641dff49,

title = "Time-resolved electric-field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy",

abstract = "The temporal behavior of the cathode sheath in 30 kHz 0.4-1 Torr H 2 discharges has been investigated by optical emission spectroscopy. Analysis of the Stark splitting of plasma-induced H Balmer delta emission was used to measure the electric field with spatial and temporal resolution in the instantaneous cathode sheath. The location of the plasma/sheath boundary was determined from the position of the maximum of the H2 d 3Πu→a 3Σg + (0,0) Q1 emission at 622.5 nm. Both methods showed that the sheath width increases as the cathode voltage becomes more negative, whereas the width remains constant as the applied voltage drops off. Analysis of the electric-field profile provided information on the time evolution of the ion density close to the electrode during the cathode half-cycle, in agreement with recent numerical calculations. At the beginning of the anodic half-cycle an intense flash of plasma-induced emission was observed, localized within 3 mm from the electrode.",

author = "Booth, \{Jean Paul\} and Jacques Derouard and Majida Fadlallah and Nader Sadeghi",

year = "1993",

month = jan,

day = "1",

doi = "10.1063/1.354878",

language = "English",

volume = "74",

pages = "862--867",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "2",

}

TY - JOUR

T1 - Time-resolved electric-field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy

AU - Booth, Jean Paul

AU - Derouard, Jacques

AU - Fadlallah, Majida

AU - Sadeghi, Nader

PY - 1993/1/1

Y1 - 1993/1/1

N2 - The temporal behavior of the cathode sheath in 30 kHz 0.4-1 Torr H 2 discharges has been investigated by optical emission spectroscopy. Analysis of the Stark splitting of plasma-induced H Balmer delta emission was used to measure the electric field with spatial and temporal resolution in the instantaneous cathode sheath. The location of the plasma/sheath boundary was determined from the position of the maximum of the H2 d 3Πu→a 3Σg + (0,0) Q1 emission at 622.5 nm. Both methods showed that the sheath width increases as the cathode voltage becomes more negative, whereas the width remains constant as the applied voltage drops off. Analysis of the electric-field profile provided information on the time evolution of the ion density close to the electrode during the cathode half-cycle, in agreement with recent numerical calculations. At the beginning of the anodic half-cycle an intense flash of plasma-induced emission was observed, localized within 3 mm from the electrode.

AB - The temporal behavior of the cathode sheath in 30 kHz 0.4-1 Torr H 2 discharges has been investigated by optical emission spectroscopy. Analysis of the Stark splitting of plasma-induced H Balmer delta emission was used to measure the electric field with spatial and temporal resolution in the instantaneous cathode sheath. The location of the plasma/sheath boundary was determined from the position of the maximum of the H2 d 3Πu→a 3Σg + (0,0) Q1 emission at 622.5 nm. Both methods showed that the sheath width increases as the cathode voltage becomes more negative, whereas the width remains constant as the applied voltage drops off. Analysis of the electric-field profile provided information on the time evolution of the ion density close to the electrode during the cathode half-cycle, in agreement with recent numerical calculations. At the beginning of the anodic half-cycle an intense flash of plasma-induced emission was observed, localized within 3 mm from the electrode.

U2 - 10.1063/1.354878

DO - 10.1063/1.354878

M3 - Article

AN - SCOPUS:0011335543

SN - 0021-8979

VL - 74

SP - 862

EP - 867

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

Time-resolved electric-field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy

Abstract

Access to Document

Fingerprint

Cite this