Total internal reflection ellipsometry of periodic structures

Jaromír Pištora; Jaroslav Vlček; Petr Hlubina; Martin Foldyna; Ondřej Životský

doi:10.1117/12.675733

Total internal reflection ellipsometry of periodic structures

Jaromír Pištora
, Jaroslav Vlček
, Petr Hlubina
, Martin Foldyna
, Ondřej Životský

Technical University Ostrava

Research output: Contribution to journal › Conference article › peer-review

Abstract

The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.

Original language	English
Article number	61801E
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6180
DOIs	https://doi.org/10.1117/12.675733
Publication status	Published - 5 Apr 2006
Externally published	Yes
Event	Photonics, Devices and Systems III - Prague, Czech Republic Duration: 8 Jun 2005 → 11 Jun 2005

Keywords

Ellipsometry
Lamellar gratings
Metallic strips
Total internal reflection

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10.1117/12.675733

Cite this

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title = "Total internal reflection ellipsometry of periodic structures",

abstract = "The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.",

keywords = "Ellipsometry, Lamellar gratings, Metallic strips, Total internal reflection",

author = "Jarom{\'i}r Pi{\v s}tora and Jaroslav Vl{\v c}ek and Petr Hlubina and Martin Foldyna and Ond{\v r}ej {\v Z}ivotsk{\'y}",

year = "2006",

month = apr,

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doi = "10.1117/12.675733",

language = "English",

volume = "6180",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Photonics, Devices and Systems III ; Conference date: 08-06-2005 Through 11-06-2005",

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TY - JOUR

T1 - Total internal reflection ellipsometry of periodic structures

AU - Pištora, Jaromír

AU - Vlček, Jaroslav

AU - Hlubina, Petr

AU - Foldyna, Martin

AU - Životský, Ondřej

PY - 2006/4/5

Y1 - 2006/4/5

N2 - The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.

AB - The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.

KW - Ellipsometry

KW - Lamellar gratings

KW - Metallic strips

KW - Total internal reflection

U2 - 10.1117/12.675733

DO - 10.1117/12.675733

M3 - Conference article

AN - SCOPUS:33645411462

SN - 0277-786X

VL - 6180

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 61801E

T2 - Photonics, Devices and Systems III

Y2 - 8 June 2005 through 11 June 2005

ER -

Total internal reflection ellipsometry of periodic structures

Abstract

Keywords

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