Two-dimensional photonic crystals by focused-ion-beam etching of multilayer membranes

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	966-969
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	3
DOIs	https://doi.org/10.1116/1.1568349
Publication status	Published - 1 Jan 2003

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title = "Two-dimensional photonic crystals by focused-ion-beam etching of multilayer membranes",

author = "K. Wang and P. Filloux and N. Paraire and \{Roca i Cabarrocas\}, P. and P. Bulkin",

year = "2003",

month = jan,

day = "1",

doi = "10.1116/1.1568349",

language = "English",

volume = "21",

pages = "966--969",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

number = "3",

}

TY - JOUR

T1 - Two-dimensional photonic crystals by focused-ion-beam etching of multilayer membranes

AU - Wang, K.

AU - Filloux, P.

AU - Paraire, N.

AU - Roca i Cabarrocas, P.

AU - Bulkin, P.

PY - 2003/1/1

Y1 - 2003/1/1

U2 - 10.1116/1.1568349

DO - 10.1116/1.1568349

M3 - Article

AN - SCOPUS:0038117786

SN - 1071-1023

VL - 21

SP - 966

EP - 969

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -