Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

D. T. Nguyen; C. Baker; W. Hease; S. Sejil; P. Senellart; A. Lemaître; S. Ducci; G. Leo; I. Favero

doi:10.1063/1.4846515

Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

D. T. Nguyen, C. Baker, W. Hease, S. Sejil, P. Senellart, A. Lemaître, S. Ducci, G. Leo, I. Favero

Research output: Contribution to journal › Article › peer-review

Abstract

We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q × f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q × f of 10 ¹³ measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation. An improved disk resonator geometry integrating a shield within the pedestal is then proposed, and its working principles and performances are investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss- limited Q reaches 10⁷-10⁹ corresponding to Q × f equals 10¹⁶-10¹⁸. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.

Original language	English
Article number	241112
Journal	Applied Physics Letters
Volume	103
Issue number	24
DOIs	https://doi.org/10.1063/1.4846515
Publication status	Published - 9 Dec 2013
Externally published	Yes

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title = "Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield",

abstract = "We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q × f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q × f of 10 13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation. An improved disk resonator geometry integrating a shield within the pedestal is then proposed, and its working principles and performances are investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss- limited Q reaches 107-109 corresponding to Q × f equals 1016-1018. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.",

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AU - Nguyen, D. T.

AU - Baker, C.

AU - Hease, W.

AU - Sejil, S.

AU - Senellart, P.

AU - Lemaître, A.

AU - Ducci, S.

AU - Leo, G.

AU - Favero, I.

PY - 2013/12/9

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N2 - We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q × f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q × f of 10 13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation. An improved disk resonator geometry integrating a shield within the pedestal is then proposed, and its working principles and performances are investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss- limited Q reaches 107-109 corresponding to Q × f equals 1016-1018. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.

AB - We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q × f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q × f of 10 13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation. An improved disk resonator geometry integrating a shield within the pedestal is then proposed, and its working principles and performances are investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss- limited Q reaches 107-109 corresponding to Q × f equals 1016-1018. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

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Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

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