@inproceedings{11f1b0ce69884cf99de5bbc479475e8e,
title = "Ultrathin nanostructured c-Si solar cells by low temperature and scalable processes",
abstract = "We report on the fabrication and characterization of both flat and patterned c-Si solar cells on glass. We use epitaxial layers grown by plasma enhanced chemical vapor deposition at low temperature (T<200°C), and anodic bonding on glass substrate. Inverted nanopyramids are fabricated by nanoimprint lithography and wet etching in alkaline solution. With 3μm-thick c-Si layers, the performances achieved with planar solar cells are Jsc = 18.3mA/cm2 and η = 6.1\%. With an additional nanopyramid array on the front side of the cell, an improved short-circuit current of 25.3mA/cm2 is obtained. We present the latest experimental results and discuss the path to be followed to achieve low cost, ultrathin c-Si solar cells with a 15\% targeted efficiency.",
keywords = "Crystalline silicon, epitaxial transfer, light trapping, nanoimprint lithography, photovoltaic cells, thin films",
author = "A. Gaucher and A. Cattoni and I. Massiot and C. Dupuis and W. Chen and R. Cariou and M. Foldyna and \{Roca Cabarrocas\}, P. and L. Lalouat and E. Drouard and C. Seassal and S. Collin",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 42nd IEEE Photovoltaic Specialist Conference, PVSC 2015 ; Conference date: 14-06-2015 Through 19-06-2015",
year = "2015",
month = dec,
day = "14",
doi = "10.1109/PVSC.2015.7356215",
language = "English",
series = "2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015",
}