A continuous non-linear shadowing model of columnar growth

T. H. Vo Thi; J. L. Rouet; P. Brault; J. M. Bauchire; S. Cordier; C. Josserand

doi:10.1088/0022-3727/41/2/022003

A continuous non-linear shadowing model of columnar growth

T. H. Vo Thi
, J. L. Rouet
, P. Brault
, J. M. Bauchire
, S. Cordier
, C. Josserand

conventionnée avec l'Université d'Orléans
Institut Jean Le Rond d'Alembert

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

We propose the first continuous model with long range screening (shadowing) that describes columnar growth in one space dimension, as observed in plasma sputter deposition. It is based on a new continuous partial derivative equation with non-linear diffusion and where the shadowing effects apply on all the different processes.

langue originale	Anglais
Numéro d'article	022003
journal	Journal of Physics D: Applied Physics
Volume	41
Numéro de publication	2
Les DOIs	https://doi.org/10.1088/0022-3727/41/2/022003
état	Publié - 21 janv. 2008
Modification externe	Oui

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10.1088/0022-3727/41/2/022003

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@article{dadeab7016ca408cb79954a996b12a96,

title = "A continuous non-linear shadowing model of columnar growth",

abstract = "We propose the first continuous model with long range screening (shadowing) that describes columnar growth in one space dimension, as observed in plasma sputter deposition. It is based on a new continuous partial derivative equation with non-linear diffusion and where the shadowing effects apply on all the different processes.",

author = "\{Vo Thi\}, \{T. H.\} and Rouet, \{J. L.\} and P. Brault and Bauchire, \{J. M.\} and S. Cordier and C. Josserand",

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AU - Vo Thi, T. H.

AU - Rouet, J. L.

AU - Brault, P.

AU - Bauchire, J. M.

AU - Cordier, S.

AU - Josserand, C.

PY - 2008/1/21

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N2 - We propose the first continuous model with long range screening (shadowing) that describes columnar growth in one space dimension, as observed in plasma sputter deposition. It is based on a new continuous partial derivative equation with non-linear diffusion and where the shadowing effects apply on all the different processes.

AB - We propose the first continuous model with long range screening (shadowing) that describes columnar growth in one space dimension, as observed in plasma sputter deposition. It is based on a new continuous partial derivative equation with non-linear diffusion and where the shadowing effects apply on all the different processes.

U2 - 10.1088/0022-3727/41/2/022003

DO - 10.1088/0022-3727/41/2/022003

M3 - Article

AN - SCOPUS:38049048030

SN - 0022-3727

VL - 41

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 2

M1 - 022003

ER -

A continuous non-linear shadowing model of columnar growth

Résumé

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