Résumé
The integration of the nanopore drilled in a nanometric thin and therefore fragile membrane in a macroscopic set-up necessitates a multiscale approach. An integration technique to select and support such a nanopore is described, using a Pyrex device with a micropore. Therefore, we developed a method to fabricate micrometer sized apertures in Pyrex wafers relying on a specific control of HF etching. The integration of FIB nanodrilled membrane in this Pyrex set-up is here discussed.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 1311-1313 |
| Nombre de pages | 3 |
| journal | Microelectronic Engineering |
| Volume | 85 |
| Numéro de publication | 5-6 |
| Les DOIs | |
| état | Publié - 1 mai 2008 |
| Modification externe | Oui |
Empreinte digitale
Examiner les sujets de recherche de « A new way to integrate solid state nanopores for translocation experiments ». Ensemble, ils forment une empreinte digitale unique.Contient cette citation
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver