Résumé
The electronic structure and bonding geometry of acetylene adsorbed at room temperature on Si(111)-7×7 is studied by a combination of synchrotron radiation x-ray photoemission spectroscopy and of near-edge x-ray absorption fine structure spectroscopy. Then the stability of the molecule, submitted to thermal annealings and to synchrotron white beam irradiation is examined. The possibility of using acetylene gas as a carbon source for the fabrication of silicon-carbon compounds (or for the formation of abrupt carbon/silicon interfaces) is discussed.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 1692-1696 |
| Nombre de pages | 5 |
| journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 16 |
| Numéro de publication | 3 |
| Les DOIs | |
| état | Publié - 1 janv. 1998 |
| Modification externe | Oui |
Empreinte digitale
Examiner les sujets de recherche de « Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7 ». Ensemble, ils forment une empreinte digitale unique.Contient cette citation
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver