Catalytic role of boron atoms in self-interstitial clustering in Si

Gyeong S. Hwang; William A. Goddard

doi:10.1063/1.1596729

Catalytic role of boron atoms in self-interstitial clustering in Si

Gyeong S. Hwang
, William A. Goddard

University of Texas at Austin
California Institute of Technology

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

langue originale	Anglais
Pages (de - à)	1047-1049
Nombre de pages	3
journal	Applied Physics Letters
Volume	83
Numéro de publication	5
Les DOIs	https://doi.org/10.1063/1.1596729
état	Publié - 4 août 2003
Modification externe	Oui

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10.1063/1.1596729

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title = "Catalytic role of boron atoms in self-interstitial clustering in Si",

abstract = "The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.",

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AU - Hwang, Gyeong S.

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N2 - The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

AB - The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

U2 - 10.1063/1.1596729

DO - 10.1063/1.1596729

M3 - Article

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SN - 0003-6951

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EP - 1049

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 5

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Catalytic role of boron atoms in self-interstitial clustering in Si

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