CF A2σ+-X2Π and B2 Δ - X2Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X2Π concentrations, and gas temperatures

Jorge Luque; Eric A. Hudson; Jean Paul Booth

doi:10.1063/1.1527923

CF A²σ⁺-X²Π and B² Δ - X²Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X²Π concentrations, and gas temperatures

Jorge Luque
, Eric A. Hudson
, Jean Paul Booth

Lam Research Corporation

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

A systematic study of the spectral intensities of the CF A-X and B-X bands by broadband absorption spectroscopy is presented. As such, the CF A²∑⁺v'=3 level and found that it is highly predissociated. Experimentally derived electronic transition moments are used to derive absolute transition probabilities after renormalization to the CF A²∑⁺v'=0 experimental radiative lifetime. It is shown by the intensity data for the CF B-X system that the interaction between CF B²Δ state and Rydberg 3d²Δ at short distance is weak.

langue originale	Anglais
Pages (de - à)	622-632
Nombre de pages	11
journal	Journal of Chemical Physics
Volume	118
Numéro de publication	2
Les DOIs	https://doi.org/10.1063/1.1527923
état	Publié - 8 janv. 2003

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10.1063/1.1527923

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@article{92810a3f686a4775b1ae21fa17253c10,

title = "CF A2σ+-X2Π and B2 Δ - X2Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X2Π concentrations, and gas temperatures",

abstract = "A systematic study of the spectral intensities of the CF A-X and B-X bands by broadband absorption spectroscopy is presented. As such, the CF A2∑+v'=3 level and found that it is highly predissociated. Experimentally derived electronic transition moments are used to derive absolute transition probabilities after renormalization to the CF A2∑+v'=0 experimental radiative lifetime. It is shown by the intensity data for the CF B-X system that the interaction between CF B2Δ state and Rydberg 3d2Δ at short distance is weak.",

author = "Jorge Luque and Hudson, \{Eric A.\} and Booth, \{Jean Paul\}",

year = "2003",

month = jan,

day = "8",

doi = "10.1063/1.1527923",

language = "English",

volume = "118",

pages = "622--632",

journal = "Journal of Chemical Physics",

issn = "0021-9606",

number = "2",

}

CF A²σ⁺-X²Π and B² Δ - X²Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X²Π concentrations, and gas temperatures. / Luque, Jorge; Hudson, Eric A.; Booth, Jean Paul.
Dans: Journal of Chemical Physics, Vol 118, Numéro 2, 08.01.2003, p. 622-632.

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

TY - JOUR

T1 - CF A2σ+-X2Π and B2 Δ - X2Π study by broadband absorption spectroscopy in a plasma etch reactor

T2 - Determination of transition probabilities, CF X2Π concentrations, and gas temperatures

AU - Luque, Jorge

AU - Hudson, Eric A.

AU - Booth, Jean Paul

PY - 2003/1/8

Y1 - 2003/1/8

N2 - A systematic study of the spectral intensities of the CF A-X and B-X bands by broadband absorption spectroscopy is presented. As such, the CF A2∑+v'=3 level and found that it is highly predissociated. Experimentally derived electronic transition moments are used to derive absolute transition probabilities after renormalization to the CF A2∑+v'=0 experimental radiative lifetime. It is shown by the intensity data for the CF B-X system that the interaction between CF B2Δ state and Rydberg 3d2Δ at short distance is weak.

AB - A systematic study of the spectral intensities of the CF A-X and B-X bands by broadband absorption spectroscopy is presented. As such, the CF A2∑+v'=3 level and found that it is highly predissociated. Experimentally derived electronic transition moments are used to derive absolute transition probabilities after renormalization to the CF A2∑+v'=0 experimental radiative lifetime. It is shown by the intensity data for the CF B-X system that the interaction between CF B2Δ state and Rydberg 3d2Δ at short distance is weak.

U2 - 10.1063/1.1527923

DO - 10.1063/1.1527923

M3 - Article

AN - SCOPUS:0037425696

SN - 0021-9606

VL - 118

SP - 622

EP - 632

JO - Journal of Chemical Physics

JF - Journal of Chemical Physics

IS - 2

ER -